Modular Microfabrication Instrument with Exchangeable Heads

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Solution Overview

Problem

Current micro and nanoscale fabrication techniques require expensive instrumentation and highly trained personnel, making them inaccessible to smaller institutions and educational settings, and there is a need for a versatile, low-cost instrument capable of performing multiple lithographic methods with high precision and ease of use.

Innovation Solution

A compact, modular microfabrication and nanofabrication device with multi-axis positioning stages and exchangeable module heads that can perform various techniques such as photolithography, UV nanoimprint lithography, and microcontact printing, allowing for easy switching between methods and operation at both micro and nanoscale resolutions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple micro and nanofabrication techniques are implemented using separate specialized instruments, then each technique can be performed with high precision and reliability, but the cost of instrumentation becomes extremely high and the device complexity increases significantly

Engineering Contradiction:
Improvecapability to perform multiple fabrication techniquesVSAvoidinstrumentation complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent implements a single hardware platform that can perform multiple micro and nanofabrication techniques (photolithography, nanoimprint lithography, microcontact printing, hot embossing, scanning probe lithography) through exchangeable module heads. Each module head is designed to perform specific fabrication techniques while sharing common positioning and control infrastructure, thereby achieving versatility without proportionally increasing overall system complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The fabrication instrument is divided into modular components: a shared hardware platform with multi-axis positioning stages and exchangeable module heads. Each module head can be independently designed, manufactured, and replaced to perform different fabrication techniques. This segmentation allows each module to be optimized for its specific function while sharing common infrastructure, reducing overall system complexity.

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If specialized trained personnel are used to operate complex fabrication instruments, then high precision fabrication can be achieved, but the accessibility to smaller institutions and educational settings is severely limited

Engineering Contradiction:
Improvemicro and nanoscale fabrication precisionVSAvoidease of use
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

The module heads are designed with self-alignment features and automated positioning capabilities that reduce the need for operator skill. The exchangeable modules come pre-configured with their own alignment mechanisms, and the hardware platform includes automated registration systems that compensate for positioning variations, allowing less trained personnel to achieve consistent high precision results.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system incorporates feedback mechanisms including position sensors, alignment detection systems, and automated control loops that continuously monitor and adjust the positioning and operation of module heads. This feedback enables the system to maintain high precision even when operated by personnel with varying levels of training, as the automated systems compensate for operational variations.

Inventive Principle:
Principle #23Feedback

3Volume of moving object

If a compact design is implemented to make the instrument suitable for lab and classroom settings, then accessibility improves, but the capability to perform techniques requiring large instrument footprints is reduced

Engineering Contradiction:
Improveinstrument sizeVSAvoidfabrication technique capability
Core Design Contradiction:
Volume of moving objectVSAdaptability or versatility

Solution Approach 1:

The module heads are designed to be compact and nestable on the hardware platform. When not in use, module heads can be stored in dedicated slots or mounted on the platform in a space-efficient manner. The exchangeable module architecture allows multiple specialized modules to share the same compact platform, effectively nesting multiple fabrication capabilities within a single compact instrument footprint.

Inventive Principle:
Principle #7Nested doll (Nesting)

Data Source

PatentUS10252463B2Compact instrument with exchangeable modules for multiple microfabrication and/or nanofabrication methods
Publication Date: 2019.04.09 AMRO NABIL A
  • US10252463B2 patent drawing
  • US10252463B2 patent drawing
  • US10252463B2 patent drawing

AI summary

A device used as an instrument for microfabrication and/or nanofabrication featuring exchangeable module heads and multi-axis positioning of components. For example, a single module head can be adapted for carrying out photolithography, microcontact printing, and/or nanoimprint lithography. Another module head can be adapted to carry out different methods. The versatile device is used for training and is compact and relatively inexpensive. A working example for microcontact printing is provided.