Modular Microwave Power Supply Assembly for Hot-Swappable Plasma Maintenance
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing plasma process systems face complex and error-prone cabling issues due to the large number of applicators arranged in geometrically diverse configurations, leading to system failures and high costs when a power supply fails.
Innovation Solution
A modular power supply assembly with microwave power supplies that can be individually plugged and unplugged from a base, allowing easy attachment and detachment from the plasma process chamber without disrupting the system, combined with a control system for precise power management and shielding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a large number of applicators are arranged in geometrically diverse configurations to handle complex plasma processing tasks, then the system's functionality and versatility are improved, but the cabling becomes very complex, confusing, and error-prone
Solution Approach 1:
The power supply system is segmented into multiple independent microwave power supply units, each capable of being connected to applicators through standardized interfaces. This segmentation allows each unit to be managed separately, reducing the overall cabling complexity while maintaining the ability to support geometrically diverse applicator configurations.
Solution Approach 2:
A universal base structure with standardized plug contacts is implemented, allowing different microwave power supply units to be interchangeably connected to various applicators. This universal interface design simplifies the cabling system by providing a consistent connection method across diverse configurations, reducing errors and improving ease of operation.
2Reliability
If the power supply assembly is designed as a fixed integrated system to ensure stability, then system reliability is improved, but maintenance becomes time-consuming and costly when a power supply fails
Solution Approach 1:
The power supply assembly is divided into separable microwave power supply units that can be individually removed from the base. This segmentation maintains system stability during operation while enabling quick replacement of failed units, significantly reducing maintenance time and costs compared to a fixed integrated system.
Solution Approach 2:
The system transitions from a static fixed design to a dynamic reconfigurable design where microwave power supply units can be added, removed, or replaced during operation. This dynamic capability allows the system to maintain reliability while adapting to maintenance needs, enabling hot-swapping of power supply units without disrupting the overall plasma processing system.
3Ease of operation
If the entire power supply assembly must be separated to maintain or replace a single microwave power supply, then component access is simplified, but system downtime increases significantly
Solution Approach 1:
The power supply units are segmented as independent modules that can be accessed and replaced individually while remaining connected to the base structure. This segmentation allows maintenance personnel to access and replace a single microwave power supply without separating the entire assembly, minimizing system downtime while maintaining ease of component access.
Solution Approach 2:
The base structure serves as an intermediary platform that provides standardized interfaces between microwave power supply units and applicators. This intermediary design allows individual power supply units to be quickly swapped while maintaining connections to the rest of the system, reducing downtime without complicating component access.
4Reliability
If multiple microwave power supplies are permanently fixed to the base to ensure stable operation, then system reliability is improved, but flexibility for maintenance and reconfiguration is reduced
Solution Approach 1:
The system employs a dynamic design where microwave power supply units are securely mounted to the base through standardized interfaces rather than permanent fixation. This dynamic mounting allows units to be firmly connected during operation for stability while enabling easy removal and reconfiguration during maintenance, providing both operational reliability and maintenance flexibility.
Solution Approach 2:
The base structure incorporates universal plug contacts that provide stable electrical connections during operation while allowing flexible reconfiguration. This universal interface design ensures reliable power transmission when units are connected while enabling easy replacement and reconfiguration of microwave power supply units based on maintenance needs or changing operational requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables quick and easy maintenance of microwave power supplies, reduces downtime, and maintains plasma process continuity by allowing individual power supply replacement and adjustment, enhancing system reliability and efficiency.
Implementation Method 1
a plurality of microwave power supplies 2a, 2b, 2c, 2d, ... 2n, each designed to generate a microwave power signal with a power ≥100 W and a frequency ≥300 MHz for generating a plasma 7 in a plasma process chamber 6
Implementation Method 2
for generating a plasma 7 in a plasma process chamber 6
Data Source
AI summary
A power supply assembly includes a plurality of microwave power supplies each designed to generate a microwave power signal for generating a plasma in a plasma process chamber, and a base including an upper face and a lower face. The microwave power supplies being arrangeable as an assembly on the upper face of the base. The base including plug contacts on the upper face, where the microwave power supplies include mating elements which match the plug contacts. The microwave power supplies being pluggable with the mating elements into the plug contacts of the base and being mechanically fastenable. At least one of the microwave power supplies being individually separable from the base while one or a plurality of the microwave power supplies are being operated. The base is designed to be attached with the lower face to a plasma process chamber upper face.