Modular Mirror Arrangement for Microlithography

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Solution Overview

Problem

The complexity and manufacturing costs of microlithographic projection exposure apparatuses are increased due to the integration of flexures directly into individual mirrors, which are difficult and costly to realize, especially when using ceramic materials for EUV applications.

Innovation Solution

A modular mirror arrangement where flexures are integrated into a common component separate from the individual mirrors, allowing for the use of optimal materials for each part, with the flexures being formed from metallic materials and the mirrors from ceramic materials, and enabling tiltable and translational degrees of freedom through a clamping connection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If flexures are integrated directly into individual mirrors, then the mirrors achieve required actuation capability, but the complexity and manufacturing costs increase significantly

Engineering Contradiction:

Improveactuation capabilityVSAvoidcomplexity of optical components

Core Design Contradiction:

Ease of operationVSDevice complexity

Solution Approach 1:

The system is divided into two separate modules: individual mirrors that serve purely optical functions, and a common component that houses all flexures for actuation. This segmentation allows each module to be optimized independently, reducing the complexity of individual mirrors while maintaining overall actuation capability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Multiple flexures are merged into a single common component that serves all individual mirrors. Instead of each mirror having its own integrated flexure, the common component provides actuation functionality for the entire mirror array, reducing overall device complexity and manufacturing costs.

Inventive Principle:

Principle #5Merging (Combining)

2Ease of operation

If flexures are integrated into individual mirrors, then actuation is achieved, but manufacturing outlay and costs increase

Engineering Contradiction:

Improveactuation capabilityVSAvoidmanufacturing outlay

Core Design Contradiction:

Ease of operationVSEase of manufacture

Solution Approach 1:

By separating the actuation function into a common component, the manufacturing process is simplified. Individual mirrors can be manufactured without complex mechanical features, and the common component with integrated flexures is produced once to serve all mirrors, reducing total manufacturing outlay.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The common component serves a universal actuation function for all individual mirrors in the array. This multi-functional design eliminates the need to manufacture identical flexure-integrated mirrors repeatedly, significantly reducing manufacturing costs through economies of scale.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Manufacturing precision

If individual mirrors are made from ceramic material for EUV specifications, then optical performance is improved, but the realization of flexures becomes particularly difficult and costly

Engineering Contradiction:

Improveoptical precisionVSAvoidrealization of flexures

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The system separates optical functions (ceramic mirrors) from mechanical actuation functions (metallic common component with flexures). This allows ceramic mirrors to be manufactured with high optical precision without the complexity of integrating flexures, while the common component provides the necessary actuation capability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system uses a composite approach combining ceramic materials for mirrors (optical precision) with metallic materials for the common component and flexures (mechanical flexibility). This material combination allows each component to be made from the most suitable material for its specific function, overcoming the limitations of using a single material for both optical and mechanical requirements.

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces manufacturing complexity and costs by allowing separate optimization of materials and simplifying the production process, while maintaining the required actuation capabilities for the mirrors, including thermal expansion compensation.

Implementation Method 1

a metallic support 150, in particular a flexure plate, in which a multiplicity of flexures 151, 152, 153, 154 are integrated

Methodology Applied

Scientific EffectElastic deformation: Elasticity

Implementation Method 2

simplifying the production process, while maintaining the required actuation capabilities for the mirrors, including thermal expansion compensation

Methodology Applied

Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentEP2805204B1Mirror arrangement, in particular for use in a microlithographic projection exposure apparatus

Publication Date: 2019.09.11 CARL ZEISS SMT GMBH

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AI summary

The invention relates to a mirror arrangement, in particular for use in a microlithographic projection exposure apparatus, comprising a plurality of individual mirrors (101, 102, 103, 104,...) and a plurality of flexures (151, 152, 153, 154,...), wherein each individual mirror (101, 102, 103, 104,...) is tiltable about at least one tilting axis by means of one of said flexures and wherein the flexures (151, 152, 153, 154,...) are integrated into a common component.