Heating device and substrate processing apparatus comprising the same
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Solution Overview
Problem
Conventional heating devices for processing liquids suffer from low heating efficiency due to multiple heat transfer steps, risk of damage to plastic covers, contamination from metal particles, and stagnation of processing liquid, leading to inefficient and potentially malfunctioning heating systems.
Innovation Solution
A heating device comprising a series of unit heaters with flow paths and heating wires integrated into pipes, where the processing liquid flows through, ensuring direct heat transfer and minimizing stagnation, with quartz pipes for chemical stability and reduced particle generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a conventional heat source with body and cover is used, then the heating element can generate heat, but the multiple heat transfer steps reduce heating efficiency
Solution Approach 1:
The patent removes the cover component from the heating device, extracting the unnecessary heat transfer interface. The heating element is positioned to directly contact the processing liquid, eliminating the cover that caused heat loss and potential contamination while maintaining the heating function.
Solution Approach 2:
The heating device is segmented into distinct functional components: the heating element, the body structure, and the processing liquid container. This segmentation allows the heating element to be optimally positioned for direct heat transfer to the liquid without being constrained by a cover structure.
2Reliability
If a fluororesin cover is used to surround the heating element, then the heating element is protected, but the cover may be damaged by high-temperature heat and allow processing liquid to enter
Solution Approach 1:
The cover is completely removed from the design, eliminating the component that is susceptible to heat damage. The heating element operates exposed to the processing liquid environment, with the body structure providing necessary support rather than thermal protection.
Solution Approach 2:
The operating temperature parameters are managed by direct immersion of the heating element in the processing liquid, which acts as a thermal sink. This changes the thermal management approach from protected indirect heating to direct controlled heating, preventing excessive temperature buildup that would damage the cover.
3Reliability
If a fluororesin cover is used, then the heating element is enclosed, but metal particles can migrate from the heating element through the cover to contaminate the processing liquid
Solution Approach 1:
The cover is removed, eliminating the pathway through which metal particles could migrate. The heating element is positioned such that any potential particle generation occurs directly in the processing liquid where it can be observed and managed, rather than being concealed behind a permeable cover.
Solution Approach 2:
The processing liquid itself acts as an intermediary medium between the heating element and the external environment. Instead of using a cover as the barrier, the liquid medium directly contacts the heating element, and any contamination would be immediately apparent in the liquid rather than hidden behind the cover.
4Temperature
If the processing liquid is heated in a water tank, then the liquid can be heated, but some liquid may stagnate and be excessively heated
Solution Approach 1:
The system transitions from static heating of stagnant liquid to dynamic circulation. The processing liquid continuously flows through the heating device, ensuring uniform temperature distribution and preventing localized overheating. The heating element moves with the liquid flow rather than heating a fixed volume.
Solution Approach 2:
The heating process becomes continuous rather than batch-based. Processing liquid constantly flows through the heating zone, receiving continuous heat input at a controlled rate. This continuous action prevents temperature stratification and ensures all liquid receives consistent heating without stagnation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances heating efficiency, prevents damage to the heating system, reduces contamination, and ensures consistent temperature control, improving process yield and maintaining the purity of the processing liquid.
Implementation Method 1
a plurality of heating wires spaced apart from each other, formed on a surface of the pipe, and connecting the input terminal and the output terminal
Data Source
AI summary
A heating device capable of heating a processing liquid stably and efficiently is provided. The heating device comprises a first unit heater including a first flow path, a second unit heater including a second flow path, and a first tube connecting the first unit heater and the second unit heater, wherein a processing liquid flows through the first flow path, the first tube, and the second flow path, and is heated by the first unit heater and the second unit heater, wherein the first unit heater comprises a first pipe extending along a first direction and including the first flow path formed therein along the first direction, a first input terminal formed on a surface of the first pipe and extending in the first direction, a first output terminal formed on a surface of the first pipe, extending in the first direction, and spaced apart from the first input terminal, a plurality of first heating wires spaced apart from each other, formed on a surface of the first pipe, and connecting the first input terminal and the first output terminal.