Modular Multi-Tube Pressure Regulation for Semiconductor Pipelines
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Solution Overview
Problem
Existing semiconductor manufacturing machines face issues with pipeline damage leading to liquid leakage and contamination, inefficient pressure regulation due to one-to-one design of pressure regulators, and cumbersome configuration adjustments, which hinder production efficiency and yield.
Innovation Solution
A modular multi-pipe pressure regulator with 2 to 10 suction pump connectors, switches, detectors, rotation speed regulators, alarms, and a controller, enabling flexible configuration and intelligent pressure adjustment, reducing size and enhancing adaptability to machine requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a single pressure regulator with one suction pump is used, then the device structure is simple, but it can only regulate the pressure of a single pipeline and cannot adapt to varying manufacturing needs
Solution Approach 1:
The pressure regulator is divided into multiple independent modules, each containing a suction pump connector, switch, detector, rotation speed regulator, alarm, and control unit. This segmentation allows the system to support multiple pipelines simultaneously while maintaining manageable complexity through standardized modular components.
Solution Approach 2:
The pressure regulator is designed with universal multi-functionality to handle multiple pipelines and semiconductor manufacturing machines simultaneously. The modular architecture with standardized connectors and control units enables the single device to adapt to varying manufacturing needs across different pipelines and machines.
2Ease of operation
If one-to-one design structure is used with each machine having its own pressure regulator, then each machine can be independently controlled, but the configuration is cumbersome and not conducive to enhancing operational efficiency
Solution Approach 1:
Multiple pressure regulators are merged into a single integrated modular device that can control multiple pipelines simultaneously. The shared control unit and modular detector-switch-regulator-alarm sets enable centralized management while maintaining individual pipeline control capabilities, significantly improving operational efficiency.
Solution Approach 2:
The system incorporates dynamic switching capabilities where the control unit can independently control each switch based on operational requirements. This dynamic configuration allows flexible adaptation to different manufacturing scenarios without requiring physical reconfiguration of the entire system.
3Volume of moving object
If modular design with multiple suction pump connectors is used, then the overall size of the regulator can be reduced and adaptability improved, but the device complexity increases
Solution Approach 1:
The modular components (detectors, switches, rotation speed regulators, alarms) are nested within integrated control modules that connect to the central control unit. This nesting approach consolidates multiple functions into compact units, reducing the overall device size while managing complexity through hierarchical organization.
Solution Approach 2:
The modular design uses universal multi-functional components that can serve multiple purposes. Each module integrates detection, switching, speed regulation, and alarm functions, reducing the need for separate dedicated components and thereby minimizing overall device size while maintaining full functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The modular design allows for efficient space-saving installation, automatic error correction, and intelligent data analysis to prevent production losses, improving operational efficiency and yield by adapting to varying manufacturing needs.
Implementation Method 1
the application of one semiconductor manufacturing machine corresponding to one liquid supply source is used to suck the pipeline through the suction pump, so as to reduce the pressure in the pipeline
Implementation Method 2
a pressure detector, configured to correspond to the pump drive connectors respectively and installed in the pipeline of the corresponding semiconductor manufacturing machine, for detecting a pressure in the pipeline
Implementation Method 3
a rotation speed regulator, configured to correspond to the pump drive connectors respectively, for modulating a rotation speed of the corresponding suction pump
Data Source
AI summary
A modular multi-pipe pressure regulator for semiconductor manufacturing machines includes 2˜10 pump drive connectors, 2˜10 switches, 2˜10 pressure detectors, 2˜10 rotation speed regulators, 2˜10 alarms and a controller. Each pressure detector is installed in a pipeline of a semiconductor manufacturing machine for detecting the pipeline to feed back a pressure value. The controller has an intelligent computing model. When receiving external power drive, the controller independently controls each switch and lets the pump drive connectors and the rotation speed regulators drive and operate the suction pump and monitor its suction pump to obtain multiple time point rotational speeds after the switch is turned on. The controller detects each pressure value according to a set value and drives the rotation speed regulator to regulate the rotation speed of the suction pump, in order to maintain the pressure value of the pipeline within a tolerance range of the set value.