Modular Pulse Generator Coupling for High-Voltage Capacitive Loads
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Solution Overview
Problem
Existing high-power generators struggle to deliver pulsed high voltage and current efficiently to capacitive loads in plasma processes, particularly in applications like etching and layer deposition, due to voltage handling limitations of semiconductor switches and high frequency requirements.
Innovation Solution
A high-power generator system comprising multiple low-power generators with energy storage components, connected in a coupling configuration, and controlled by a unit to produce step-function outputs with sequential activation and deactivation, allowing for efficient high voltage and current delivery with reduced size and increased efficiency through direct liquid cooling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a single high-power generator is used to deliver high voltage and current to capacitive loads, then the power delivery capability is improved, but the voltage handling capability of semiconductor switches deteriorates due to exceeding voltage limits
Solution Approach 1:
The patent divides a single high-power generator into multiple low-power generators, each operating within safe voltage limits. These modular units are connected in series through a coupling mechanism to achieve the required high output voltage while maintaining individual switch safety margins
2Reliability
If multiple low-power generators are connected in series to achieve high voltage output, then the voltage handling capability is improved, but the device complexity increases
Solution Approach 1:
The patent merges multiple low-power generator modules into a unified high-power system through a coupling mechanism. This modular approach allows standardized components to be combined systematically, reducing overall system complexity compared to designing a single custom high-voltage generator
3Ease of manufacture
If conventional cooling methods are used for high-power generators, then the ease of manufacture is improved, but the efficiency and size reduction deteriorate due to insufficient cooling capability and larger clearance requirements
Solution Approach 1:
The patent implements direct liquid cooling by immersing generator components in dielectric cooling liquid. This hydraulic cooling method dramatically improves heat removal efficiency compared to conventional air cooling, reducing power losses and enabling compact design with smaller clearance requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables the generation of high-power pulses with sharp voltage transitions and reduced power losses, effectively addressing the limitations of existing technologies by providing a compact, efficient, and reliable solution for plasma processes.
Implementation Method 1
The dielectric cooling liquid may flow through the housing. By that the cooling and isolation could be enhanced.
Data Source
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AI summary
High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising: - several low-power- (LP-) generators (14, 16 ,18), ∘ each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component, ∘ each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18), - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18), - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20), - wherein the HP-generator (10) is at least partially directly liquid cooled, in particular by immersed dielectric cooling liquid, in particular the LP-generators (14,16,18) are bathed by dielectric cooling liquid.