Modular High-Power Pulse Generator for High-Voltage Plasma Switching
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Solution Overview
Problem
Plasma treatment applications, such as etching or layer deposition, require high voltage and high frequency rectangular, asymmetrical, pulsed voltage supplies, which often exceed the voltage handling capabilities of individual semiconductor switches, especially during high frequency operation.
Innovation Solution
A high power generator configured with multiple low power generators, each with an energy storage component, connected through a coupling that allows for selective contribution of LP generators to generate high voltage and current pulses, using a transformer-based charging system and control unit to manage energy distribution and pulse shaping.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a single high power generator is used to deliver high voltage pulses, then the voltage handling capability is improved, but the device complexity and cost increase significantly
Solution Approach 1:
The patent divides the high power generator into multiple low power generator modules, each capable of delivering a portion of the total required power. These modules are connected in parallel through a coupling network, allowing them to collectively deliver the required high voltage and power to the plasma process while keeping individual module complexity low and manageable
2Device complexity
If multiple low power generators are used in parallel, then the device complexity is reduced, but the coupling value at output may not reach the required high voltage level
Solution Approach 1:
The patent combines multiple low power generator modules through a coupling network where their outputs are electrically connected in parallel. The control unit coordinates the switching of individual modules so that their combined output achieves the required high voltage and power levels, effectively merging their capabilities to meet the plasma process requirements
3Productivity
If high frequency operation is required for plasma processes, then the productivity is improved, but the voltage handling requirements exceed individual switch capabilities
Solution Approach 1:
The patent segments the high frequency high voltage generation task across multiple low power generator modules. Each module operates at manageable voltage levels but the collective parallel operation through the coupling network delivers the required high frequency, high voltage output to the plasma process, enabling high productivity without exceeding individual component limits
Solution Approach 2:
The control unit dynamically switches individual low power generator modules on and off based on the required output power and voltage levels. This dynamic allocation allows the system to adapt to varying plasma process requirements while maintaining high frequency operation, optimizing both productivity and component stress management
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient delivery of high power pulses with sharp voltage transitions and reduced power losses, effectively addressing the limitations of existing technologies in handling high voltage and frequency requirements for plasma processes.
Implementation Method 1
A charging energy of the plurality of LP generators is supplied over a transformer with a primary winding and a secondary winding for each respective LP generator
Implementation Method 2
The secondary winding is connected to a rectifier. The rectifier is connected to the energy storage component of the corresponding LP generator
Data Source
AI summary
A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the LP generators are electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the LP generators. The control unit is configured to select a respective contribution of each LP generator in order to generate a rise and/or a decay of a pulse at the output of the coupling. A charging energy of the LP generators is supplied over a transformer with a primary winding and a secondary winding for each LP generator. The secondary winding is connected to a rectifier, which is connected to the energy storage component of the corresponding LP generator, and/or a plurality of the primary windings is connected in series.