Modular High-Power Pulse Generator for Sharp Plasma Voltage Transitions
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Solution Overview
Problem
Plasma treatment applications, such as etching or layer deposition, require high voltage and high frequency rectangular, asymmetrical pulsed voltage supplies, which often exceed the voltage handling capabilities of individual semiconductor switches, especially during high frequency operation.
Innovation Solution
A high power generator system comprising multiple low power generators with energy storage components, electrically connected through a coupling mechanism, where a control unit selects the contribution of each generator to generate a rise and/or decay of pulses, achieving a step-function output without continuous slope, utilizing galvanically isolated connections and sequential activation of generators to form sharp voltage transitions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a single high power generator is used to deliver high voltage pulses, then the voltage handling capability is sufficient, but the complexity of controlling multiple generators and synchronizing their output increases
Solution Approach 1:
The high power generator is divided into multiple low power generator modules, each capable of independent operation. This segmentation allows the system to achieve high voltage output through series connection of multiple modules while maintaining simpler control for each individual module, resolving the contradiction between voltage handling capability and control complexity
2Power
If multiple low power generators are connected in parallel to increase current capability, then the current output is improved, but the voltage handling capability decreases
Solution Approach 1:
The system dynamically reconfigures the connection topology of multiple low power generator modules between series and parallel configurations based on the required output characteristics. This dynamic reconfiguration allows the system to achieve both high voltage (series connection) and high current (parallel connection) capabilities with the same hardware, resolving the contradiction between current capability and voltage handling
3Stability of the object's composition
If continuous pulse slope is used to smooth transitions, then the output stability is improved, but the power loss increases due to extended transition time
Solution Approach 1:
The system uses periodic switching of capacitor banks in discrete steps rather than continuous modulation. This periodic action creates a stepped approximation of the desired pulse shape that achieves sufficient stability for plasma processing while minimizing the transition time and associated power losses, resolving the contradiction between output stability and power loss
4Productivity
If high frequency operation is implemented to increase productivity, then the output frequency is improved, but the voltage handling capability of individual switches deteriorates
Solution Approach 1:
The system segments the high frequency operation across multiple low voltage switch modules operating in parallel or series combinations. Each individual switch operates at manageable voltage levels while the collective array achieves the required high frequency output, resolving the contradiction between productivity and voltage handling capability of individual switches
Data Source
AI summary
A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a respective contribution of each of the plurality of LP generators in order to generate a rise and/or a decay of a pulse at the output of the coupling, in a sequenced way through the plurality of LP generators. The control unit is further configured to select the respective contribution of each of the plurality of LP generators in a galvanically isolated way, via a fiber optic connection or a magnetically coupling.