Modular Nanosecond Pulser Circuit for Low-Parasitic High-Voltage Output

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Solution Overview

Problem

Current nanosecond pulsers face challenges in producing high peak voltage and power with short pulse widths and fast rise times while maintaining low stray inductance and capacitance, which limits their efficiency and versatility.

Innovation Solution

A nanosecond pulser design incorporating a transformer with low stray inductance and capacitance, coupled with solid state switches such as IGBTs and FETs, and a snubber diode circuit, allowing for high peak voltage and power output with pulse widths less than 1000 nanoseconds and rise times under 50 nanoseconds.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If conventional nanosecond pulser designs are used, then high peak voltage and power output can be achieved, but stray inductance and capacitance increase, reducing efficiency and versatility

Engineering Contradiction:
Improvepeak power outputVSAvoidstray inductance and capacitance
Core Design Contradiction:
PowerVSObject-generated harmful factors

Solution Approach 1:

The pulser is divided into multiple independent switch modules (first, second, third, and fourth switch modules), each with its own solid state switch. This segmentation allows each module to be optimized for low stray inductance and capacitance while collectively achieving high peak power output through parallel operation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Traditional mechanical or vacuum tube switching mechanisms are replaced with solid state switches (IGBTs, FETs, MOSFETs). This substitution eliminates the high stray inductance and capacitance associated with mechanical contacts and vacuum tube structures, enabling efficient nanosecond-scale switching at high power levels.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Duration of action of moving object

If pulse width is reduced to achieve nanosecond duration, then pulse speed increases, but energy storage and switching efficiency become more difficult to maintain

Engineering Contradiction:
Improvepulse widthVSAvoidenergy storage and switching efficiency
Core Design Contradiction:
Duration of action of moving objectVSUse of energy by moving object

Solution Approach 1:

Energy is pre-stored in capacitors connected to each switch module before the pulse is generated. This preliminary energy storage allows the solid state switches to simply redirect the stored energy during the nanosecond pulse, rather than generating it from scratch, thereby maintaining high switching efficiency despite the extremely short pulse duration.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system uses dynamic switching of multiple parallel pathways (different switch modules) to adaptively control energy delivery. The solid state switches can rapidly transition between states, optimizing energy transfer efficiency for each nanosecond pulse while maintaining the ability to sustain multiple pulses.

Inventive Principle:
Principle #15Dynamics

3Speed

If rise time is reduced to under 50 nanoseconds, then pulse sharpness improves, but switching speed requirements increase, complicating the design

Engineering Contradiction:
Improverise timeVSAvoidswitching speed requirements
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The switching function is segmented across multiple parallel switch modules, each handling a portion of the total power. This allows each individual solid state switch to operate at manageable switching speeds while the collective array achieves the required overall rise time under 50 nanoseconds through parallel current summation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system changes the operating parameters of the solid state switches, selecting devices with optimized switching characteristics for nanosecond operation. By carefully selecting switch types (IGBTs, FETs, MOSFETs) and adjusting gate drive parameters, the system achieves sub-50 nanosecond rise times without excessive complexity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves high peak voltage and power output with rapid pulse generation, enabling variable pulse widths and frequencies, and reduces energy loss through efficient energy storage and switching.

Implementation Method 1

The transformer may include a core, a plurality of primary windings wound at least partially around a portion of the core, each of the plurality of switch modules may be coupled with a subset of the primary windings, and a plurality of secondary windings wound at least partially around a portion of the core

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Data Source

PatentUS11159156B2High voltage nanosecond pulser
Publication Date: 2021.10.26 EHT VENTURES LLC
  • US11159156B2 patent drawing
  • US11159156B2 patent drawing
  • US11159156B2 patent drawing

AI summary

A nanosecond pulser may include a plurality of switch modules, a transformer, and an output. Each of the plurality of switch modules may include one or more solid state switches. The transformer may include a core, at least one primary winding wound around at least a portion of the core, each of the plurality of switch modules may be coupled with the primary windings, and a plurality of secondary windings wound at least partially around a portion of the core. The output may output electrical pulses having a peak voltage greater than about 1 kilovolt and having a pulse width of less than about 1000 nanoseconds. The output may output electrical pulses having a peak voltage greater than about 5 kilovolts, a peak power greater than about 100 kilowatts, a pulse width between 10 nanoseconds and 1000 nanoseconds, a rise time less than about 50 nanoseconds, or some combination thereof.