Modular Purge Module for Load Port Gas Control
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Solution Overview
Problem
Conventional load ports without gas purging functions are not adaptable to various wafer carriers and are expensive to replace with new models that include nitrogen purging capabilities.
Innovation Solution
A modular purge system comprising a detachable jig, gas control box, and pipes that can be installed on existing load ports to provide gas purging functionality, allowing for adaptation to different wafer carriers without requiring a new load port, featuring a suction port for secure fastening and a sealing mechanism to reduce abrasion and extend the life of sealing components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a new load port with nitrogen purging function is used to remove foreign substance, then the purging capability is improved, but the cost increases significantly
Solution Approach 1:
The load port system is divided into two parts: the existing load port structure is retained, and a separate, detachable purging module is added. This module includes a nitrogen gas supply system with nozzles positioned to deliver gas directly into the wafer carrier, allowing the purging function to be added without replacing the entire load port, thus reducing cost while maintaining reliability
Solution Approach 2:
The invention changes the physical state and delivery method of nitrogen gas by introducing it directly into the wafer carrier through controlled nozzles rather than relying on ambient diffusion. This parameter change in gas delivery methodology enables effective purging at lower overall gas consumption and lower cost compared to replacing the entire load port system
2Adaptability or versatility
If a new load port is designed for each wafer carrier type to ensure proper fit, then the adaptability is improved, but the device complexity increases
Solution Approach 1:
The purging module is designed as a universal, detachable unit that can be attached to different load port types and configured for various wafer carrier types. The module includes adjustable components and interchangeable elements that allow it to adapt to different carrier geometries without requiring a completely different load port design, thus maintaining versatility while reducing overall system complexity
Solution Approach 2:
The purging module incorporates dynamic and adjustable elements such as movable nozzles, adjustable gas flow rates, and flexible positioning mechanisms that allow the same module to adapt to different wafer carrier types. This dynamic capability enables a single module design to serve multiple functions across different carrier types without increasing the number of permanent load port variants
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables existing load ports to acquire gas purging capabilities without replacement, allowing for flexibility with various wafer carriers while minimizing additional space requirements and extending the lifespan of sealing components.
Implementation Method 1
a gas inlet for providing a wafer carrier with gas
Implementation Method 2
a suction port fastening the wafer carrier by sucking the wafer carrier
Implementation Method 3
the sealing member including an elastic material
Data Source
AI summary
A purge module which can provide a conventional load port without a gas purging function with the gas purging function, and a load port having the purge module are disclosed. The purge module comprises a jig, a gas control box and pipes. The jig is detachably attached to an upper side of a stage of a load port. The jig comprises a gas inlet for providing a wafer carrier with gas and a gas outlet for receiving gas from the wafer carrier. The gas control box is detachably attached to the load port to control gas flow. The pipes connect the jig and the gas control box.