Modular Overhead Raceway Assembly for Reconfigurable Wafer Rail Layouts
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Solution Overview
Problem
Existing overhead transport systems in semiconductor fabrication facilities require prolonged installation lead time and increased production costs due to the need for uninstalling and reinstalling guide rails and supporting structures when adapting to new fab layouts or processes, limiting flexibility and efficiency.
Innovation Solution
Pre-assembling supporting structures like raceway modules with multiple installation positions and slide rails to allow for easy reconfiguration without uninstalling the entire system, enabling quick shifts in rail positions to accommodate new layouts without disrupting ongoing operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If guide rails and supporting structures are installed component-by-component to different locations on the ceiling according to a rail plan, then the rail system can be precisely installed to match the fab layout, but the installation lead time is prolonged and fab ramping time increases
Solution Approach 1:
The patent applies preliminary action by pre-assembling complete rail assemblies (including guide rails and supporting structures) in a factory setting before installation. This allows the entire assembly to be prepared in advance and then quickly installed as a unit at the fab site, significantly reducing on-site installation lead time while maintaining precise positioning through the pre-integrated design.
Solution Approach 2:
The patent segments the rail system into modular assemblies that can be independently manufactured, tested, and installed. Each modular assembly contains complete functional units (guide rails with supporting structures) that can be installed as discrete components, reducing the complexity and time of overall installation while maintaining precise alignment through standardized interfaces.
2Adaptability or versatility
If guide rails are uninstalled and reinstalled to new locations according to a new rail plan, then the rail system can adapt to different fabrication processes, but the installation lead time is prolonged and production cost increases
Solution Approach 1:
The patent implements dynamics by designing the supporting structures with adjustable and reconfigurable features. The supporting structures can be repositioned along the ceiling grid system to accommodate different rail plans, allowing the system to adapt to changing fabrication process requirements without complete reinstallation, thereby reducing reconfiguration time and cost.
Solution Approach 2:
The patent applies universality by creating a standardized ceiling mounting system that can support multiple rail configurations. The supporting structures are designed with universal mounting capabilities that allow the same hardware to accommodate different rail plans and fab layouts, enabling the system to serve multiple functions and adapt to various fabrication processes without requiring specialized components for each configuration.
3Adaptability or versatility
If guide rails and supporting structures are uninstalled and reinstalled, then the rail system can accommodate new fab layouts, but fab ramping time increases and production cost increases
Solution Approach 1:
The patent applies preliminary action by pre-configuring modular rail assemblies with multiple installation options before they reach the fab site. These pre-assembled units can be quickly deployed to match different fab layouts without requiring time-consuming on-site construction, thereby accelerating fab ramping speed while maintaining the ability to adapt to various layouts through the pre-integrated modular design.
Data Source
AI summary
The present disclosure provides a method to install a rail assembly according to different rail plans. A method according to the present disclosure includes assembling an overhead raceway module that includes a plurality of first level raceways extending along a first direction, and a plurality of second level raceways extending along a second direction perpendicular to the first direction, each of the plurality of second level raceways being fastened to the plurality of first level raceways, raising the overhead raceway module adjacent to a ceiling, installing the overhead raceway module to the ceiling, and fastening a rail assembly to the plurality of second level raceways, the rail assembly extending lengthwise along the first direction. A width of the overhead raceway module along the second direction is at least three times a width of the rail assembly along the second direction.