Modular Process Chamber Reflector for Fast Segment Replacement
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Solution Overview
Problem
The replacement of reflectors in process chambers, such as semiconductor process chambers, is a time-consuming process that results in significant downtime due to the need to disconnect and remove existing components before installing new reflectors.
Innovation Solution
A modular reflective heating system is introduced, featuring a base and a reflective assembly with individually disconnectable reflective portions. This allows for the quick replacement of specific reflective portions with spare parts having different reflective properties, such as varying coatings or radii of curvature, without removing the entire reflector.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a reflector is replaced to improve temperature control and uniformity, then the temperature control and uniformity are improved, but the downtime for replacement increases significantly
Solution Approach 1:
The reflector is divided into multiple independently replaceable segments or portions. Each segment can be removed and replaced without requiring removal of the entire reflector assembly, enabling quick exchange of individual segments to optimize temperature control while minimizing downtime.
Solution Approach 2:
Individual reflector segments are extracted from the overall reflector assembly for replacement. The design allows specific segments to be taken out and swapped with new or different segments without disturbing the rest of the reflector structure, reducing replacement time while maintaining temperature control benefits.
2Adaptability or versatility
If the entire reflector is replaced to change reflective properties, then the reflective properties are improved, but the complexity of the replacement process increases
Solution Approach 1:
The reflector is segmented into modular portions that can be independently replaced. This allows changing reflective properties by swapping only the necessary segments rather than the entire reflector, simplifying the replacement process while maintaining adaptability of reflective characteristics.
Solution Approach 2:
Different segments of the reflector can have different reflective properties tailored to specific zones. This allows localized optimization of reflective characteristics without requiring complete reflector replacement, reducing complexity while improving adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The modular design significantly reduces downtime by enabling the rapid replacement of individual reflective portions, allowing for improved temperature control and uniformity without the need for extensive chamber disassembly.
Implementation Method 1
one or reflectors positioned around the substrate (e.g., over the substrate support) to reflect energy (e.g., infrared energy) towards the substrate during processing
Data Source
AI summary
A modular reflective heating system for use in a process chamber is provided. The modular reflective heating system includes: a plurality of connectors; a plurality of lamps, each lamp connected to at least one of the connectors; a reflector including: a base; and a reflective assembly including a first plurality of reflective portions and a second plurality of reflective portions. Each reflective portion in the first plurality of reflective portions and the second plurality of reflective portions is connected to the base, and each reflective portion in the first plurality of reflective portions and the second plurality of reflective portions is configured to be individually disconnected from the base. The modular reflective heating system further includes a spare reflective portion configured to replace a first reflective portion in the first plurality of reflective portions or the second plurality of reflective portions.