Modular Scanner With Interchangeable Test Units

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Automated probers are inflexible and require significant effort to change or test substrates that differ in type or form, limiting their ability to perform specialized tests on individual components.

Innovation Solution

A modular prober system with interchangeable modules that can operate in both fully automatic and semi-automatic modes, allowing for flexible configuration and use of separate test units with independent machine and process controls, enabling testing of diverse substrates and tailored test procedures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If automated probers are used for high-throughput testing, then productivity is improved, but adaptability deteriorates due to inflexibility in handling different substrate types and forms

Engineering Contradiction:
Improvetesting throughputVSAvoidflexibility to test different substrates
Core Design Contradiction:
ProductivityVSAdaptability or versatility

Solution Approach 1:

The prober is divided into separate, independently controllable test units, each capable of performing complete testing functions. This segmentation allows individual units to be dedicated to specific substrate types while maintaining overall system productivity through parallel operation and selective activation of units based on substrate requirements.

Inventive Principle:
Principle #1Segmentation

2Adaptability or versatility

If a single prober is used for multiple substrate types, then adaptability is improved, but device complexity increases due to reconfiguration requirements

Engineering Contradiction:
Improveability to test various substratesVSAvoidreconfiguration effort
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

Each test unit is designed with universal functionality to handle complete testing workflows for its designated substrate type, eliminating the need for reconfiguration when switching between different substrate types. The modular architecture with independent machine and process controls allows each unit to operate autonomously without affecting others, simplifying the overall system complexity while maintaining versatility.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If manual testing is performed for irregularly shaped substrates, then adaptability is improved, but productivity deteriorates due to operator involvement

Engineering Contradiction:
Improveability to test irregular substratesVSAvoidtesting efficiency
Core Design Contradiction:
Adaptability or versatilityVSProductivity

Solution Approach 1:

The test units incorporate dynamic positioning and alignment capabilities that can adapt to irregularly shaped substrates in real-time. The independent machine controls enable flexible movement and adjustment of probing systems to accommodate various substrate geometries, while automated process controls maintain high testing speeds and efficiency without manual intervention.

Inventive Principle:
Principle #15Dynamics

Data Source

PatentEP2612156B1Modular scanner, and method for operating same
Publication Date: 2021.04.28 CASCADE MICROTECH INC
  • EP2612156B1 patent drawingFigure 1
  • EP2612156B1 patent drawingFigure 2

AI summary

The invention relates to a scanner for checking and testing electronic semiconductor components, said scanner comprising at least two checking units (9, 10), each of which is equipped with a chuck (18), sensors (26), and a positioning unit (23) and each of which is assigned to a machine (5, 6) and a process control (3, 4). The scanner further comprises a loading device (16) for manually loading at least one of the checking units (9, 10) and a loading unit (11) for automatically loading both checking units (9, 10), a user interface (7, 8), and a module control (2) for controlling the process and/or the machine controls (3, 4, 5, 6) and the loading unit (11). The user interface (7, 8) can optionally be connected to at least one of the process controls (3, 4) or the module control (2) by means of a connecting device (1) of the scanner. The invention also relates to a method for optionally operating the scanner fully or semi-automatically, said operation being determined in particular by the type of loading of the checking units (9, 10).