Modular Waste Gas Scrubber Layout With Shared Water Treatment
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Solution Overview
Problem
Existing semiconductor manufacturing waste gas reduction systems require large installation spaces, consume excessive water, and incur high maintenance costs due to separate reaction and water treatment components, posing safety risks and inefficiencies.
Innovation Solution
A modular waste gas reduction device with multiple reaction chambers, integrating a common water tank and water treatment exhaust pipe, and using shutoff valves to isolate individual reaction chambers, allowing for efficient space utilization and reduced water consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate reaction chambers and water treatment components are used for each scrubber unit, then each unit can operate independently, but the installation space and water consumption increase significantly
Solution Approach 1:
The scrubber system is divided into modular reaction chambers that can be independently configured, while sharing common water treatment infrastructure. This segmentation allows flexible arrangement of reaction chambers (e.g., series or parallel configurations) without requiring duplicate water treatment components for each chamber, thereby reducing overall installation space while maintaining independent operational capability through modular design.
Solution Approach 2:
A single water treatment component (wet tower or water tank) serves multiple reaction chambers simultaneously. The common water treatment infrastructure handles waste gas from multiple chambers, eliminating the need for separate water treatment systems for each chamber. This multi-functional approach significantly reduces water consumption and installation space while maintaining system reliability through centralized treatment.
2Ease of repair
If separate water treatment components are provided for each reaction chamber, then maintenance can be performed on individual units, but water consumption and operational costs increase
Solution Approach 1:
Multiple reaction chambers share a common water treatment component (wet tower or water tank). This consolidation reduces the total number of water treatment components required, thereby decreasing water consumption and operational costs. The merged system maintains ease of repair by allowing individual reaction chambers to be isolated and maintained independently while the common water treatment infrastructure serves all chambers.
3Ease of repair
If multiple complete scrubber units are installed to handle waste gas from multiple reaction chambers, then each unit can be maintained independently, but the installation space and equipment cost increase
Solution Approach 1:
The system is segmented into independent reaction chambers that can be maintained individually, while the water treatment function is consolidated into shared infrastructure. This segmentation strategy allows maintenance personnel to access and service individual reaction chambers without affecting other chambers, while the common water treatment components reduce overall space requirements compared to installing complete separate scrubber units for each chamber.
Solution Approach 2:
The common water treatment components serve multiple reaction chambers simultaneously, replacing the need for multiple complete scrubber units. This universal approach reduces installation space by eliminating redundant water treatment infrastructure while maintaining independent maintenance capability through the modular reaction chamber design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The modular design reduces installation space by 56%, operational costs by 15%, and product price by 30%, while simplifying maintenance and management, and minimizing water usage.
Implementation Method 1
the reaction chamber 11 burns the waste gas to decompose harmful components contained in the waste gas into harmless or low-toxic gases
Implementation Method 2
the gas is cooled down while flowing from the reaction chamber 11 to the water treatment exhaust pipe 12 through the cooling connection pipe 13
Implementation Method 3
The waste gas decomposed in the reaction chamber 11, which contains HF and F- is dissolved while passing through a cooling connection pipe 13
Data Source
Figure 1~2
Figure 3~4a
Figure 4b~5
AI summary
A waste gas reduction device with multiple reaction chambers includes a reaction module 100 including a reaction chamber 120 therein and excluding a water treatment exhaust pipe, a water treatment module 200 including a water treatment exhaust pipe 220 therein, and a connection pipe 140 connecting the reaction chamber in the reaction module to the water treatment exhaust pipe of the water treatment module, in which there are a plurality of reaction modules arranged, and the reaction chamber of each reaction module is connected to the water treatment exhaust pipe through the connection pipe.