Modular Seal Ring Assembly for Semiconductor Fluid Delivery
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Solution Overview
Problem
Current fluid delivery systems in semiconductor chip fabrication require faster assembly and service due to increased performance demands, with existing seals not efficiently meeting the need for higher performance and ease of maintenance.
Innovation Solution
A modular fluid delivery system incorporating a substrate block, active component, and seal ring design that includes annular sleeve grooves and seal retention features to facilitate fluid-tight connections and efficient assembly, allowing for improved sealing and reduced assembly time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If traditional seals and assembly methods are used, then fluid delivery systems can be assembled and serviced, but the assembly and service time is excessive and efficiency is low
Solution Approach 1:
The seal ring is divided into two separate components: an interior sleeve and an outer ring. These segmented components can be assembled independently into the substrate block and active component respectively, allowing parallel assembly operations that reduce total assembly time while maintaining fluid-tight sealing performance.
Solution Approach 2:
The interior sleeve is nested within the outer ring to form the complete seal ring assembly. The interior sleeve fits inside the outer ring, creating a compact nested structure that simplifies the overall assembly process and reduces the number of separate sealing components that need to be installed and positioned.
2Reliability
If higher performance seals are used to meet increased performance demands, then sealing reliability improves, but the complexity of assembly and maintenance increases
Solution Approach 1:
By segmenting the seal ring into an interior sleeve and outer ring, the patent actually reduces assembly complexity despite maintaining high sealing performance. Each segment can be independently installed into pre-prepared seal channels in the substrate block and active component, making the assembly process more straightforward rather than more complex.
Solution Approach 2:
The seal ring design with interior sleeve and outer ring serves multiple functions: the interior sleeve provides the primary sealing surface against the substrate block, the outer ring provides the secondary sealing surface against the active component, and together they create a redundant sealing system that enhances reliability while maintaining manageable complexity through modular installation.
3Ease of operation
If traditional single-piece seal rings are used, then the structure is simple, but the fluid-tight sealing performance and ease of service are insufficient
Solution Approach 1:
The seal ring is segmented into an interior sleeve and outer ring that can be independently assembled and serviced. This segmentation allows for easier maintenance where individual segments can be removed and replaced without requiring complete disassembly of the fluid delivery system, significantly improving ease of service despite the increased structural complexity of having two components.
Solution Approach 2:
The interior sleeve and outer ring are designed to be pre-assembled into the substrate block and active component respectively during the manufacturing process. This preliminary action creates pre-prepared seal channels and interfaces that simplify field service and maintenance, allowing quick replacement of seal segments without complex disassembly procedures.
Data Source
AI summary
Fluid delivery systems are important component assemblies used for semiconductor fabrication. These fluid delivery systems rely on assemblies of components, requiring seals which must be installed and replaced during assembly and maintenance of the fluid delivery systems. Seals may be arranged as seal rings which engage substrate blocks or active components, the seal rings having seal retention features which aid in assembly. These seal retention features may increase the retention force of the seal in a seal cavity or may reduce the force required to retain the seal. In other arrangements, the seal cavities of the substrate blocks or active components may incorporate seal retention features.