Modular Silicon Carbide Crucible for Handling

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Solution Overview

Problem

Existing solutions for growing silicon carbide single crystals face challenges in adapting crucible size to different process conditions and handling larger crucibles, which complicates both preparation and removal processes.

Innovation Solution

A modular crucible design comprising a bottom part, wall part, and cover part that are releasably connected, allowing for adjustable dimensions, along with a positioning assembly and a conically inclined guide surface for optimal base material yield, and incorporating materials like ceramics or molybdenum for ease of handling and process control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If a single large crucible is used to grow larger silicon carbide single crystals, then the crystal size increases, but the handling difficulty and preparation complexity increase significantly

Engineering Contradiction:
Improvecrystal sizeVSAvoidhandling difficulty
Core Design Contradiction:
Volume of moving objectVSEase of operation

Solution Approach 1:

The crucible is divided into multiple separate parts (bottom part, wall parts, cover part) that can be assembled and disassembled. This segmentation allows the crucible to be handled in smaller sections while still producing large crystals when assembled, directly resolving the handling difficulty issue.

Inventive Principle:
Principle #1Segmentation

2Adaptability or versatility

If different sized crucibles are used for different crystal sizes, then the process can be adapted to various requirements, but the complexity of preparation and removal increases

Engineering Contradiction:
Improveprocess adaptabilityVSAvoidpreparation complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The crucible is divided into modular parts (bottom part, wall parts, cover part) that can be assembled in different configurations. This allows adaptation to various crystal sizes while maintaining consistent handling procedures for the modular components, reducing preparation complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The crucible configuration can be dynamically adjusted by assembling or disassembling wall parts to match different process requirements. This dynamic adaptability allows the same set of modular components to serve multiple purposes without increasing overall system complexity.

Inventive Principle:
Principle #15Dynamics

3Ease of operation

If a modular crucible design with multiple parts is used, then the handling and adaptation to different process conditions is simplified, but the crucible structure becomes more complex

Engineering Contradiction:
Improvehandling easeVSAvoidcrucible structure complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The crucible is divided into modular parts (bottom part, wall parts, cover part) that can be handled separately, improving ease of operation. The segmentation creates manageable components that are simpler to handle than a single large crucible, while the modular nature allows reconfiguration for different processes.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables quick adaptation to varying process conditions, simplifies handling, and ensures efficient crystal growth by maintaining a consistent vaporization rate and temperature control, thereby improving the quality and yield of silicon carbide single crystals.

Implementation Method 1

an induction heater is arranged around the chamber

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

the substance to be grown is vaporized by means of heating, so that it transitions into the gas phase

Methodology Applied
Scientific EffectVaporization: Evaporation

Implementation Method 3

In the case of the physical vapor deposition, the substance to be grown is vaporized by means of heating, so that it transitions into the gas phase. Given suitable conditions, the gas can re-sublimate on a seed crystal, whereby a growth of the crystal takes place

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Implementation Method 4

the device has a guide surface running towards the seed crystal layer and inclined against an axis of the accommodation space

Methodology Applied
Scientific EffectVapor flow: Convection

Data Source

PatentUS20230332330A1Device for growing single crystals, in particular single crystals of silicon carbide
Publication Date: 2023.10.19 EBNER-INDUSTRIEOFENBAU GMBH
  • US20230332330A1 patent drawing
  • US20230332330A1 patent drawing
  • US20230332330A1 patent drawing

AI summary

A device for growing single crystals, in particular single crystals of silicon carbide, includes a crucible, which crucible defines an outer lateral surface and moreover delimits an accommodation space with an axial extension between a bottom section and an opening section, wherein the accommodation space is designed for growing the crystals, wherein the device hast at least one seed crystal layer wherein the crucible is arranged in a chamber, in particular made of a glass material, for example quartz glass, wherein an induction heater is arranged around the chamber. The crucible is designed to have multiple parts and includes a crucible bottom section, at least one crucible wall part, and a crucible cover part, which are releasably connected to one another.