Modular Sublimation Source Trays for Independent Temperature Control
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Solution Overview
Problem
Existing precursor sources for semiconductor processing require disassembly of all trays to access a single tray, limiting flexibility and monitoring capabilities.
Innovation Solution
A sublimation source with a modular design featuring trays with embedded heaters and a clamp system that allows individual tray access and monitoring without disassembling the entire source.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If all trays are disassembled to access a single tray, then complete access to any tray is achieved, but the complexity of operation increases and time is lost
Solution Approach 1:
The source is divided into modular trays that can be independently accessed. Each tray is a separate unit that can be removed and reinstalled without affecting other trays, enabling individual tray servicing without disassembling the entire source structure.
Solution Approach 2:
The clamp mechanism provides dynamic control over tray retention. Clamps can be quickly released and reengaged to allow individual tray removal and reinstallation, transforming a static rigid structure into a dynamically configurable modular system.
2Ease of operation
If all trays are disassembled to access a single tray, then complete access to any tray is achieved, but device complexity increases
Solution Approach 1:
The source is divided into modular trays that can be independently accessed. Each tray is a separate unit that can be removed and reinstalled without affecting other trays, enabling individual tray servicing without disassembling the entire source structure.
Solution Approach 2:
The clamp mechanism serves multiple functions: it secures trays during operation, enables quick removal for servicing, and maintains structural integrity. This multi-functional design reduces the need for separate mechanisms for each operation.
3Productivity
If uniform heating is applied to all trays, then overall gas evolution is maintained, but individual tray monitoring and control is lost
Solution Approach 1:
Each tray is equipped with its own heater and temperature sensor, enabling independent temperature control and monitoring. This local quality approach allows precise measurement and control of individual tray conditions while maintaining overall system productivity.
Solution Approach 2:
Temperature sensors on each tray provide feedback to the control system, which adjusts heater power to maintain desired temperature setpoints. This closed-loop control ensures precise temperature monitoring and regulation for each tray while maintaining overall gas evolution productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time monitoring and individual control of each tray's temperature, allowing for more uniform gas evolution and extended source life by allowing for tray-by-tray servicing.
Implementation Method 1
Heating of the precursor to the sublimation temperature is provided by a heater embedded in the circumferential body of each tray. This heats the tray to increase the temperature of the tray to the sublimation temperature of the solid precursor
Implementation Method 2
a sublimation source, wherein a solid precursor is sublimated, in other words converted directly or nearly directly from its solid state to its gaseous state
Data Source
AI summary
A gas source includes a single tray or a plurality of trays including a top cover and a bottom cover, each tray including a source receiving portion and an outer circumferential wall having an outer wall surface, the outer circumferential wall including at least one projecting flange thereon, each projecting flange having an outer circumferential flange surface and a second surface extending from the circumferential flange surface in the direction of the outer wall surface, and a clamp, actuable between a circumferentially expanded condition and a circumferentially reduced condition, wherein, in the circumferentially reduced position, contact the second surface of the first tray and the second surface of the second tray.