Modular Stacked Micropump with Dual Membrane Compression
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Solution Overview
Problem
Existing gas micropumps face limitations in flexibility and efficiency due to preset number of stages and cavity volumes, requiring higher force actuation and lacking adaptability in size, weight, and power consumption, especially in handheld devices and Lab-on-Chip applications.
Innovation Solution
A modular stacked variable-compression micropump design featuring vertically arranged pump stages with dual membrane compression, allowing independent actuation of pumping membranes and microvalves, and adjustable stage volume ratios through custom plugs or varying chamber thicknesses, enabling greater flexibility and reduced power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a planar design with multiple stages is used to achieve high-pressure high-flow gas pumping, then pumping performance is improved, but the number of stages and cavity volume are preset in layout and fabrication which limits flexibility and reduces yield
Solution Approach 1:
The patent transitions from a planar design to a three-dimensional stacked configuration where multiple pump stages are vertically arranged. This dimensional change allows independent adjustment of the number of stages and cavity volumes without re-fabrication, as stages can be stacked in different quantities and configurations to meet varying performance requirements while maintaining compact form factor.
Solution Approach 2:
The pump system is divided into modular stacked stages, each with independent pumping chambers and membranes. This segmentation enables flexible combination of stages to achieve desired pressure and flow rates, while allowing individual stage optimization without affecting other stages, thereby improving both performance and adaptability.
2Productivity
If higher force actuation is used to achieve greater compression, then pumping performance is improved, but power consumption increases
Solution Approach 1:
The patent combines two pumping membranes from adjacent stages to compress a single pumping chamber, effectively doubling the compression capability without requiring proportionally higher actuation forces. The shared top wall between stages allows the membranes to work together mechanically, achieving greater compression efficiency with reduced power consumption.
Solution Approach 2:
The patent employs electrostatic actuators that utilize electric field forces rather than mechanical linkages or high-force mechanical actuators. This substitution enables precise control of membrane displacement with lower power consumption, as electrostatic forces can be modulated electrically without the friction and mechanical losses associated with traditional mechanical actuation systems.
3Productivity
If bidirectional resonant forcing is used to achieve high-pressure high-flow pumping, then pumping performance is improved, but the design requires symmetrical bidirectional membrane actuation which complicates the system
Solution Approach 1:
Instead of requiring bidirectional membrane actuation, the patent inverts the approach by using unidirectional electrostatic actuation to drive membranes in one direction only. The stacked configuration and microvalve timing are designed to achieve net pumping flow without requiring the membrane to move symmetrically in both directions, simplifying the actuation system while maintaining high pumping performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves twice the compression of conventional planar pumps, reduces the need for higher force actuation, and allows operation off-resonance, enhancing pumping performance and adaptability for various applications by optimizing size, weight, and power usage.
Implementation Method 1
Since only downward actuation is expected from electrostatically-actuated pump membranes
Data Source
AI summary
A micropump assembly is comprised of modular stacked pump stages. The modular pump stages are preferably stacked vertically on top of each other. The stacked design allows each pumping chamber to be compressed by two pumping membranes and thereby provide twice the compression as compared to conventional planar pump designs. The stacked design also eliminates the need for bidirectional movement of the pumping membrane. Lastly, the number of stacked pumping stages can be changed post-fabrication to achieve the required pressure for a given application.