Modular Transfer Module With Bellows Sealing For Substrate Processing
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in maintaining transfer robots and adding processing units due to limited access and space constraints, making it difficult to efficiently manage and expand processing capabilities.
Innovation Solution
A substrate processing apparatus design featuring a transfer module with a vertical actuator and horizontal actuator, allowing for vertical and horizontal movement of the transfer apparatus, and a modular structure that enables easy coupling and decoupling of processing modules, facilitating maintenance and the addition of processing units while reducing fluid leakage through the use of bellows members.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the transfer robot is surrounded by processing units and placement portions, then the processing capacity is increased, but the accessibility for maintenance is reduced
Solution Approach 1:
The system is divided into separable modules: processing modules (each with processing units) and transfer modules (with transfer robots). These modules can be coupled or decoupled independently, allowing the transfer robot to be accessed for maintenance by decoupling the processing modules without affecting the overall system's processing capacity when reassembled.
Solution Approach 2:
The coupling between processing modules and transfer modules is made dynamic and adjustable. The processing modules can be moved from a coupled state (surrounding the transfer robot for high productivity) to a decoupled state (allowing access to the transfer robot for maintenance), enabling the system to adapt between operational and maintenance modes.
2Productivity
If the processing units are densely arranged around the transfer robot, then the productivity is improved, but the space for adding new processing units is limited
Solution Approach 1:
The system uses modular processing modules that can be independently coupled to the transfer module. This segmentation allows for flexible arrangement where processing units are densely arranged around the transfer robot to maximize productivity, while additional processing modules can be added by coupling them to available interfaces on the transfer module or other processing modules.
Solution Approach 2:
The transfer module and processing modules are designed with universal coupling interfaces that can accommodate multiple configurations. The same interface structure allows for both dense arrangement of processing units around the transfer robot and the addition of new processing modules, providing multi-functionality and adaptability for different production requirements.
3Stability of the object's composition
If the processing modules are fixed in position, then the structural stability is improved, but the flexibility for maintenance and reconfiguration is reduced
Solution Approach 1:
The system employs dynamic coupling mechanisms that provide structural stability when processing modules are coupled to the transfer module during operation, while allowing for easy decoupling and reconfiguration when maintenance or expansion is needed. The coupling structure transitions from a fixed state during operation to a movable state during maintenance.
Solution Approach 2:
The coupling mechanism acts as an intermediary between the transfer module and processing modules. It provides a stable connection when coupled, ensuring structural stability for processing operations, while also enabling controlled decoupling for maintenance and reconfiguration, thus mediating between stability and flexibility requirements.
Data Source
AI summary
A first processing module includes a first specified processing unit and a first delivery part. A substrate supply part is on a first direction side of the first processing module. A transfer module is on a second direction side on the opposite of the first processing module from the first direction. The transfer module includes a frame, a first floor, a second floor, and a gateway. The frame defines a placement space in which a first transfer apparatus of the transfer module is placed. A first transfer apparatus is installed on the first floor. The second floor is on a third direction side, which is a horizontal direction orthogonal to the first direction, with respect to the first floor inside the placement space. The gateway is provided on the third direction side with respect to the second floor and communicates the placement space to the outside of the frame.