Modular Tray Ampoule for Semiconductor Vaporizer
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Solution Overview
Problem
Current vaporizer designs for semiconductor manufacturing are inflexible, costly, and challenging to assemble or modify, leading to long lead times and compatibility issues with existing equipment, particularly in terms of ampoule height, valve types, and precursor material handling.
Innovation Solution
A modular vaporizer vessel assembly with individually heated support trays and configurable base and lid members, allowing for customizable ampoule designs that can be retrofitted into existing facilities, featuring embedded heating elements and O-ring sealing for efficient and consistent heat application.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If traditional vaporizer vessel designs are used, then manufacturing and service issues are minimized, but the designs are rigid and cannot be customized for application-specific changes
Solution Approach 1:
The vaporizer vessel is divided into modular components including a vessel body, removable support trays, configurable lids, and base members. This segmentation allows customers to customize specific components (such as tray configurations, lid types, or base dimensions) while keeping the overall system manageable and manufacturable, resolving the contradiction between adaptability and complexity.
Solution Approach 2:
The design incorporates dynamic configurability where support trays can be arranged in different configurations, lids can be customized for specific valve types, and the overall vessel dimensions can be adjusted. This dynamic adaptability allows the same basic platform to serve multiple applications without requiring entirely new designs for each scenario.
2Ease of manufacture
If traditional vaporizer designs are used, then structural integrity is maintained, but assembly outside vendor facility becomes challenging
Solution Approach 1:
By dividing the vaporizer into modular segments (vessel body, separate support trays, removable lids, base members), the design enables assembly outside the vendor facility. Each component can be manufactured separately and then assembled by the customer or at a customer location, significantly improving ease of manufacture while reducing the complexity of requiring specialized assembly facilities.
Solution Approach 2:
The modular design enables customers to perform their own assembly operations, reducing dependence on vendor facilities. The standardized interfaces and simple assembly procedures allow customer staff to assemble the vaporizer themselves, improving ease of manufacture while reducing the complexity of requiring specialized assembly services.
3Productivity
If traditional vaporizer designs are used, then manufacturing cost is controlled, but lead times increase due to costly engineering and manufacturing changes
Solution Approach 1:
The modular segmented design allows for standardized mass production of individual components (vessel bodies, trays, lids, bases) which can then be quickly assembled. This approach improves productivity by enabling parallel manufacturing of components while maintaining manufacturing flexibility through configurable assembly options, eliminating the need for costly retooling when customizations are required.
Solution Approach 2:
The design allows for parameter changes in terms of configuration, dimensions, and component specifications without requiring fundamental design changes. Customers can modify parameters such as vessel height, port spacing, or tray arrangements within the modular framework, enabling rapid customization without the lead times associated with engineering and manufacturing changes to traditional designs.
4Adaptability or versatility
If traditional vaporizer designs are used, then compatibility with existing equipment is maintained, but retrofitting into existing facilities becomes difficult
Solution Approach 1:
The segmented modular design enables easy retrofitting into existing facilities by allowing selective replacement or reconfiguration of specific components (trays, lids, bases) without requiring complete system replacement. This improves retrofit capability while reducing installation complexity compared to traditional monolithic designs that would require complete removal and replacement.
Solution Approach 2:
The modular components are designed with universal interfaces and standardized mounting mechanisms that can be adapted to different existing equipment configurations. The same basic components can serve multiple functions and be installed in various orientations or configurations, enhancing retrofit capability while reducing the need for specialized installation procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The modular design enhances operational efficiency, reduces manufacturing costs, and addresses installation and maintenance challenges by providing flexibility in ampoule configuration, improving manufacturing speed and quality while ensuring consistent ampoule assembly and heat distribution.
Implementation Method 1
heated to cause the volatilization of the precursor... to effect sublimation or vaporization of the solid phase precursor to produce precursor vapor
Implementation Method 2
the vessel may be fabricated of a heat-conductive material and heated to cause the volatilization of the precursor
Implementation Method 3
a heated carrier gas may be flowed through the vessel to create a mass transfer gradient resulting in entrainment of precursor vapor from the solid source precursor material
Data Source
AI summary
The invention is directed to a configurable vaporizer or ampoule assembly that uses a configurable vessel body, assembled from one or more support tray modules with their own individual heating assemblies or heater members, bounded by a base member and a lid member to form the whole ampoule. This eliminates the need for the prior art ampoule body that normally holds the support trays and was used to heat each of the support trays from the exterior surface using heating jackets or the like.