Modular Ultrapure Water Train for Faster Fab Commissioning
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Solution Overview
Problem
The initial construction phase of microelectronics facilities often lacks access to ultrapure water, leading to delays in commissioning and start-up due to the absence of permanently installed ultrapure water systems.
Innovation Solution
A mobile, modular ultrapure water system comprising a storage tank, actinic radiation treatment, electrically driven water treatment, ion exchange media, and pressure-driven filtration sub-systems, capable of producing ultrapure water for rinse or makeup water in semiconductor facilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If permanently installed ultrapure water systems are used, then water quality is improved, but installation time and facility commissioning delays increase
Solution Approach 1:
The water treatment system is divided into multiple mobile modules (pretreatment module, ultraviolet oxidation module, electrodialysis module, ion exchange module, filtration module) that can be independently transported and assembled. This segmentation allows the system to deliver ultrapure water capability without requiring permanent installation, thus reducing commissioning time while maintaining water quality.
Solution Approach 2:
The system transitions from static permanently installed infrastructure to dynamic mobile platforms that can be rapidly deployed and relocated. The mobile modules can be assembled and disassembled quickly, enabling fast commissioning while providing the same ultrapure water treatment functionality as permanent systems.
2Productivity
If mobile modular systems are used, then deployment speed is improved, but system complexity increases
Solution Approach 1:
By segmenting the complex water treatment process into standardized mobile modules, each module handles a specific treatment function. This modular architecture manages complexity by allowing independent design, testing, and assembly of each module, while the overall system achieves complete ultrapure water treatment capability through module integration.
3Manufacturing precision
If multiple treatment stages are implemented, then water purity is improved, but device complexity increases
Solution Approach 1:
The multi-stage treatment process is segmented into distinct mobile modules: pretreatment module for initial filtration, ultraviolet oxidation module for organic contaminant removal, electrodialysis module for ion removal, ion exchange module for polishing, and filtration module for particulate removal. Each module is independently complex but collectively achieves ultra-pure water standards.
Solution Approach 2:
Each treatment module acts as an intermediary stage that progressively purifies the water. The output of one module becomes the input of the next, with each module specialized in removing specific types of contaminants. This intermediary approach allows complex multi-stage treatment to be managed through standardized interface connections between modules.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Provides ultrapure water of intermediate quality suitable for facility commissioning, ensuring timely completion and reducing delays by enabling easy deployment and removal from construction sites.
Implementation Method 1
a source of actinic radiation configured to irradiate the pretreated water and destroy organic contaminants in the pretreated water
Implementation Method 2
The actinic radiation treatment apparatus is configured to perform an advanced oxidation process on the pretreated water
Implementation Method 3
an electrically driven water treatment apparatus configured to receive the first partially treated water from the actinic radiation treatment apparatus and configured to remove ionic contaminants from the first partially treated water
Implementation Method 4
an ion exchange media apparatus disposed on the mobile platform and including ion exchange media, the ion exchange media apparatus configured to receive the second partially treated water from the electrically driven water treatment apparatus and remove one or more ionic species from the second partially treated water
Implementation Method 5
a pressure driven filtration sub-system disposed on the mobile platform and configured to filter particulate matter from the third partially treated water
Implementation Method 6
the membrane filtration apparatus includes an ultrafilter
Data Source
AI summary
A mobile, modular water treatment system for the production of ultrapure water includes a storage tank, an actinic radiation treatment apparatus disposed on a mobile platform, an electrically driven water treatment apparatus disposed on the mobile platform, downstream of the actinic radiation treatment apparatus, an ion exchange media apparatus disposed on the mobile platform downstream of the electrically driven water treatment apparatus, and a pressure driven filtration sub-system disposed on the mobile platform downstream of the ion exchange media apparatus. The pressure driven filtration sub-system outputs the ultrapure water and is connectable to a water distribution system for a point of use and for recirculation of a portion of the ultrapure water to the storage tank.