Modular Vacuum Pumping Layout for Condensation Control
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Solution Overview
Problem
Conventional vacuum pumping and abatement systems are bespoke and time-consuming to design and install, with difficulty in predicting temperature profiles, leading to condensation of condensable substances and operational issues due to blockages and reduced treatment effectiveness.
Innovation Solution
A modular vacuum pumping and abatement system with standardized modules and connection lines, where each module and connection line has dimensions that are integer multiples of a common fixed value, facilitating accurate prediction and management of temperature profiles and reducing condensation risks through a thermal management system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If bespoke vacuum pumping and abatement systems are designed for different processes, then system performance and reliability are improved, but design time, manufacturing time, and installation time are prolonged
Solution Approach 1:
The system is divided into separate functional modules (vacuum pumping module, abatement module, process gas management module) that can be independently designed, manufactured, and tested. This segmentation allows parallel development of different modules for different processes, reducing overall system development time while maintaining process-specific optimization
Solution Approach 2:
The patent creates universal interface standards and modular components that can be used across different process applications. Standardized connection protocols, common support infrastructure, and interchangeable module types allow the same modular architecture to serve multiple different semiconductor fabrication processes, reducing design time for new applications
2Adaptability or versatility
If conventional bespoke systems are constructed, then specific process requirements are met, but temperature profile prediction becomes difficult and condensation of condensable substances occurs
Solution Approach 1:
Temperature profiles and condensation risks are analyzed and addressed during the modular system design phase rather than during installation or operation. Thermal management strategies, insulation specifications, and heating element placements are predetermined in the module designs, allowing accurate temperature prediction before the system is fully assembled and operational
Solution Approach 2:
The modular architecture enables systematic variation of thermal parameters (insulation thickness, heating power, flow rates) across different module configurations. By standardizing certain thermal parameters while allowing others to be adjusted per process requirements, the system achieves both predictability and adaptability to different process conditions
3Quantity of substance
If condensable substances condense in the system, then gas flow is restricted and blockages form, but this reduces treatment effectiveness
Solution Approach 1:
The system incorporates preventive measures against condensation before it occurs - including thermal insulation, heated trace heating elements in connection lines, and temperature monitoring - to prevent condensable substances from condensing in the first place. This preliminary anti-action maintains gas flow and prevents blockages that would reduce treatment effectiveness
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The modular system allows for easier design, assembly, and operation by standardizing module and connection line dimensions, improving temperature profile prediction, reducing condensation, and enhancing system performance and efficiency.
Implementation Method 1
a vacuum pumping apparatus for pumping the gas from the entity
Implementation Method 2
thermal management of the system by a thermal management system to control the temperature profile of process gas within the system
Data Source
AI summary
A vacuum pumping and/or abatement system for evacuating and/or abating fluid from an entity, the system comprising: a first module comprising a vacuum pumping apparatus for pumping the fluid from the entity and/or an abatement apparatus for abating the fluid evacuated from the entity; and a second module arranged adjacent to the first module in a first system dimension; wherein the first and second modules each have a maximum size in the first system dimension that is a respective integer multiple of a common fixed system value.