Modular Vacuum Piping Layout for Uniform Process Exhaust

Solution Overview

Problem

In existing processing apparatuses, connecting pipes between process modules and vacuum pumps of varying shapes and lengths can lead to inconsistent exhaust conditions, affecting the uniformity of processes like film forming and etching.

Innovation Solution

The pipes are divided into blocks in the height direction, with each block having identical shapes and conductance, allowing for flexible routing while maintaining consistent gas flow conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If pipes are routed through clean room facilities to connect process modules and vacuum pumps, then the pipes can be connected to the required locations, but the pipe lengths and shapes become different, disrupting process uniformity

Engineering Contradiction:

Improverouting flexibilityVSAvoidprocess uniformity

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The piping system is divided into multiple sections with standardized pipe blocks. Each block has identical inlet and outlet positions, allowing modular assembly that maintains uniform conductance characteristics while adapting to different routing requirements through clean room facilities.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent standardizes key pipe parameters (inlet/outlet positions, diameters, lengths) across all pipe blocks while allowing the overall pipe configuration to vary. This maintains consistent gas flow characteristics (conductance) despite different routing paths through the clean room.

Inventive Principle:

Principle #35Parameter changes

2Manufacturing precision

If pipe shapes and lengths are made identical for all process modules, then process uniformity is maintained, but the pipes cannot accommodate different passage routes and environmental constraints

Engineering Contradiction:

Improveprocess uniformityVSAvoidrouting flexibility

Core Design Contradiction:

Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The piping system is divided into multiple sections with standardized pipe blocks. Each block has identical inlet and outlet positions, allowing modular assembly that maintains uniform conductance characteristics while adapting to different routing requirements through clean room facilities.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Standardized pipe blocks serve multiple functions: they maintain uniform conductance for process consistency, can be assembled in different configurations to accommodate various routing paths, and provide modular replacement capability. The same pipe block design is used throughout the system regardless of location.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If varying pipe lengths and shapes are used to accommodate clean room facility structures, then routing constraints are satisfied, but exhaust conditions become non-uniform, disrupting film forming and etching processes

Engineering Contradiction:

Improverouting adaptabilityVSAvoidexhaust condition uniformity

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The piping system is divided into multiple sections with standardized pipe blocks. Each block has identical inlet and outlet positions, allowing modular assembly that maintains uniform conductance characteristics while adapting to different routing requirements through clean room facilities.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent standardizes key pipe parameters (inlet/outlet positions, diameters, lengths) across all pipe blocks while allowing the overall pipe configuration to vary. This maintains consistent gas flow characteristics (conductance) despite different routing paths through the clean room.

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS12398830B2Piping structure and processing apparatus

Publication Date: 2025.08.26 TOKYO ELECTRON LTD

AI summary

A piping structure includes a plurality of pipes that connects a plurality of process modules disposed adjacent to each other at a first room and a plurality of vacuum pumps disposed at a second room below the first room to be corresponding to the plurality of process modules, respectively. The plurality of pipes are divided into a plurality of blocks in a height direction, and the plurality of pipes used for blocks in an identical height have an identical shape.