Modular Vacuum Pump Flange for Interchangeable Getter Pumps

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Solution Overview

Problem

Existing vacuum apparatuses face challenges in achieving ultrahigh vacuum pressures due to limitations in pump capacity and adaptability, particularly with ion getter and volume getter pumps, which have restricted installation space and inefficient handling of hydrogen-carbon compounds and noble gases.

Innovation Solution

A modular pump module with a flange connecting detachable vacuum pumps, allowing for interchangeable ion getter and non-evaporable getter pumps in a stacked structure, reducing installation space requirements and enabling easy maintenance and adaptation to different applications.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If ion getter pumps or volume getter pumps are used with fixed installation, then pump capacity is limited by installation space, but replacing pumps requires adjusting flange size or installation space

Engineering Contradiction:
Improveadaptability to different vacuum pump applicationsVSAvoidcomplexity of pump system configuration
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The pump system is segmented into modular components where the flange serves as a standardized interface that can connect to different vacuum pump types (ion getter pumps, volume getter pumps, NEG pumps) without requiring changes to the flange itself. This segmentation allows independent selection and replacement of pump modules while maintaining a consistent connection standard.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The flange is designed with universal connection capabilities that accommodate multiple vacuum pump types through standardized connection elements. The same flange can interface with ion getter pumps, volume getter pumps, or NEG pumps, making the connection system multi-functional and eliminating the need for application-specific flange variations.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If multiple vacuum pumps are installed in series, then pumping coverage is improved, but installation space requirements increase

Engineering Contradiction:
Improvepumping coverage for different gasesVSAvoidinstallation space
Core Design Contradiction:
Adaptability or versatilityVSVolume of moving object

Solution Approach 1:

Multiple vacuum pumps are arranged in a nested or stacked configuration where pumps are connected in series along the same installation footprint. The compact serial arrangement allows one pump to be positioned within or adjacent to another, enabling multiple pumping stages to occupy the space of a single pump while maintaining enhanced pumping coverage for different gas types.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Reliability

If vacuum pumps are permanently installed, then system stability is maintained, but maintenance and replacement require system disassembly

Engineering Contradiction:
Improvesystem stabilityVSAvoidease of pump maintenance
Core Design Contradiction:
ReliabilityVSEase of repair

Solution Approach 1:

The connection between the flange and vacuum pumps transitions from a permanent fixed installation to a dynamic detachable connection using standardized connection elements. This allows pumps to be easily attached and detached without compromising the overall system stability, enabling quick maintenance and replacement while maintaining reliable vacuum sealing when pumps are installed.

Inventive Principle:
Principle #15Dynamics

4Productivity

If different flange sizes are used for different pump configurations, then pump capacity requirements are met, but device complexity and installation complexity increase

Engineering Contradiction:
Improvepump capacityVSAvoidcomplexity of flange configuration
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

A single standardized flange design serves multiple pump capacity requirements through the use of interchangeable connection elements and modular pump attachments. The universal flange eliminates the need for multiple flange sizes, maintaining pump capacity versatility while significantly reducing flange configuration complexity and installation complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The modular design enhances adaptability and reduces installation space, improves pump efficiency by allowing interchangeable pumps, and simplifies electrical connections, ensuring consistent supply voltage and reduced leakage risks.

Implementation Method 1

By means of the high voltage electrons are accelerated from the cathode to the anode and thereby ionise gas particles

Methodology Applied
Scientific EffectIonisation: Ionisation

Implementation Method 2

gas particles, which are then accelerated towards the cathode and there adsorbed

Methodology Applied
Scientific EffectAdsorption: Adsorption

Implementation Method 3

reach the anode and are there implanted by their kinetic energy in the anode

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Implementation Method 4

Known volume getter pumps work on the principle of the chemical sorption of reactive gaseous media in particular, such as oxygen, nitrogen and the like

Methodology Applied
Scientific EffectChemical sorption: Chemisorption

Implementation Method 5

A magnetic field applied externally by a permanent magnet increases the potential for ionisation of the gas particles by the accelerated electrons

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Data Source

PatentEP3875760B1Pump module
Publication Date: 2024.07.10 EDWARDS VACUUM LLC
  • EP3875760B1 patent drawingFigure 1
  • EP3875760B1 patent drawingFigure 2

AI summary

Pump module (10) for a vacuum apparatus with a flange (12), which can be connected to a vacuum apparatus in a vacuum-tight manner, and at least one first vacuum pump, where the first vacuum pump is an ion getter pump (18) or a volume getter pump, NEG. The flange further has a first connection element, the first pump being directly and detachably connected to the flange by the first connection element.