Modular Vacuum Robot Platform With Inductive Power Transfer
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Solution Overview
Problem
Existing substrate transport systems in vacuum chambers face challenges in maintaining a sealed environment while allowing for efficient movement of robots and substrate handling, leading to contamination risks and increased costs due to the need for vacuum-compatible components.
Innovation Solution
A substrate transport apparatus with a robot enclosure that uses a linear drive system, power coupling via magnetic induction, and optical communication, allowing the robot to move within the vacuum chamber without breaching the sealed environment, and featuring a modular design for scalability and reduced contamination risks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a robot moves within a vacuum chamber using traditional mechanical drive systems, then the robot can transport substrates, but the mechanical contact and sealing mechanisms increase contamination risks and require vacuum-compatible materials
Solution Approach 1:
The patent replaces traditional mechanical drive systems with a linear motor system that uses magnetic fields to propel the robot along rails. This eliminates mechanical contact between the drive mechanism and the robot, reducing contamination risks while maintaining efficient substrate transport capability
Solution Approach 2:
The patent introduces magnetic fields as an intermediary between the power source and the robot drive mechanism. Power is transferred inductively through the vacuum chamber walls without physical penetration, and motion is achieved through magnetic interaction between the linear motor and rails, maintaining the vacuum seal while enabling robot movement
2Ease of operation
If physical contact mechanisms are used for power and data transfer across the vacuum chamber wall, then power and communication can be supplied to the robot, but the sealing integrity is compromised and contamination risks increase
Solution Approach 1:
The patent replaces mechanical contact-based power transfer with inductive power transfer using electromagnetic fields. Power is transmitted through the vacuum chamber wall without physical penetration, maintaining seal integrity while providing continuous power to the robot drive system
Solution Approach 2:
The patent uses electromagnetic fields as intermediaries to transfer power and data across the vacuum chamber boundary. The linear motor system and inductive power transfer mechanism enable communication and energy transfer without compromising the vacuum seal
3Object-affected harmful factors
If custom vacuum-compatible components are used throughout the system, then contamination is minimized, but the cost and device complexity increase significantly
Solution Approach 1:
The patent divides the system into distinct segments: a vacuum-compatible minimal interface (rails and linear motor) and a standard robot drive system. This segmentation allows most components to use standard, non-vacuum-compatible materials while maintaining vacuum integrity where needed, reducing overall system complexity and cost
Solution Approach 2:
The patent replaces complex vacuum-compatible mechanical drive systems with a simplified linear motor system that requires minimal vacuum-compatible components. The magnetic field-based drive mechanism and inductive power transfer eliminate the need for complex sealing mechanisms and vacuum-compatible actuators
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and contamination-free movement of robots and substrates within vacuum chambers, reducing the need for vacuum-compatible components and lowering manufacturing costs while maintaining a sealed environment.
Implementation Method 1
a linear motor component configured to provide a magnetic field to move the robot drive along the plurality of rails
Implementation Method 2
a power coupling component configured to transfer power to another power coupling component on the robot drive, wherein the transfer of power is through induction
Data Source
AI summary
An apparatus including a first base plate, where the first base plate is configured to have at least one linear drive component and/or at least one power coupling component connected to a top side of the first base plate, where the first base plate is configured to be located inside a vacuum chamber; and a plurality of rails or transport guides on the top side of the first base plate. An end of the first base plate includes at least one alignment feature configured to align an end of the first base plate to an end of a second base plate. The first base plate is configured to provide, in combination with the second base plate, a structural platform inside the vacuum chamber for a robot drive to move in the vacuum chamber along the plurality of transport guides.