Modular Vapor Delivery with Heated Conduit for Precursor Mixing
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Solution Overview
Problem
Conventional vapor delivery systems for semiconductor process tools are complex and inefficient, requiring separate flow paths for individual precursor vapors, which can lead to condensation and require extensive heating elements, increasing costs and complexity.
Innovation Solution
A modular vapor delivery system with a vaporizer module as the final stage, integrated with a flow control component module, allows for mixing and vaporizing multiple precursor streams efficiently, using a heated conduit to maintain vapor phase and reduce condensation, with optional chemistry ampoules and external storage units for precursor supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If separate flow paths are used for individual precursor vapors, then delivery precision is improved, but system complexity increases
Solution Approach 1:
The patent combines multiple separate flow paths into a single integrated flow path that can handle multiple precursor species. The flow control component includes multiple inlet ports that converge into a common outlet, allowing precise delivery of multiple precursors through a simplified architecture rather than requiring separate complete flow paths for each precursor.
Solution Approach 2:
The flow control component is designed as a universal module that can handle multiple precursor species simultaneously through a single flow path. The component includes multiple inlet ports that can accommodate different precursors and delivers them through a common outlet to the showerhead, making the system multi-functional rather than requiring separate dedicated paths.
2Reliability
If extensive heating elements are used to prevent condensation, then vapor delivery reliability is improved, but cost increases
Solution Approach 1:
The patent merges multiple heated flow paths into a single heated flow path, reducing the total amount of heating elements required. The flow control component integrates multiple precursor inlets into one common outlet path that is heated to prevent condensation, eliminating the need for separate heating elements in each individual flow path while maintaining vapor delivery reliability.
3Manufacturing precision
If multiple separate flow paths are used, then vapor mixing precision is improved, but device complexity increases
Solution Approach 1:
The flow control component merges multiple precursor flow streams into a single mixed flow path before delivery to the showerhead. The component includes multiple inlet ports that receive different precursors and combines them through internal flow channels into one outlet, achieving precise vapor mixing in a single integrated structure rather than requiring separate complete flow paths for mixing.
4Device complexity
If a compact modular system is used, then device complexity is reduced, but adaptability decreases
Solution Approach 1:
The flow control component is designed as a universal module with multiple inlet ports that can accommodate different precursor species. This multi-functional design allows the single modular component to handle various precursor combinations and configurations, maintaining high adaptability while keeping the overall system compact and less complex than conventional separate flow path systems.
Solution Approach 2:
The modular flow control component allows for dynamic configuration of precursor delivery. The single integrated component with multiple inlets can be adapted to deliver different precursor combinations by adjusting flow rates through each inlet port, providing operational flexibility and adaptability within the compact modular architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system simplifies design, reduces costs, and ensures precise vapor ratios by maintaining precursor vapors in the gas phase, minimizing condensation and clogging, while enabling efficient delivery to process chambers.
Implementation Method 1
a heated conduit coupled to the vaporizer module and to a process chamber. The heated conduit may be preheated to a setpoint temperature corresponding to the highest boiling point or sublimation point of the mixture precursor components
Implementation Method 2
a vaporizer module operable to vaporize a liquid stream comprising one or more precursor components
Implementation Method 3
Vaporization temperatures may be greater than 100° C.
Data Source
AI summary
A modular vapor delivery system comprising a flow control component module that comprises a first inlet port and a second inlet port. a liquid flow controller coupled to an outlet port of the flow control component module, and a vaporizer module coupled to an outlet port of the liquid flow controller.