Modular Wafer Probe Card With Detachable Interposer
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Solution Overview
Problem
Conventional wafer probe cards face complications and inefficiencies in disassembling, inspecting, and reassembling components when individual elements such as the interposer, space transformer, or probe assembly are faulty, requiring tedious calibration and extensive troubleshooting.
Innovation Solution
The wafer probe card is designed with an adapter module and a probe module, allowing for independent assembly and modular replacement of the interposer, space transformer, and probe assembly, enabling faster and more convenient maintenance by partially disassembling and replacing faulty components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the holding member, interposer, space transformer, probe head and leaf springs are fastened on the wiring board by bolts, then the structural stability is improved, but the ease of repair deteriorates because all components must be disassembled to replace a single faulty component
Solution Approach 1:
The probe card is divided into modular components: a fixed portion (wiring board with holding member) and a replaceable portion (interposer, space transformer, probe assembly). The interposer is detachably mounted on the holding member, allowing the replaceable portion to be separated and replaced independently without disassembling the entire structure, thus resolving the contradiction between structural stability and ease of repair.
2Ease of repair
If all components are disassembled to replace a damaged component, then the faulty component can be replaced, but the loss of time increases due to extensive disassembly and reassembly
Solution Approach 1:
By segmenting the probe card into fixed and replaceable portions with a detachable interposer, only the necessary components (interposer, space transformer, probe assembly) can be removed together as a unit for replacement. This modular design eliminates the need to disassemble and reassemble unrelated components, significantly reducing maintenance time while enabling complete replacement of the faulty assembly.
3Measurement precision
If connection terminals are calibrated during assembly, then the electrical connection accuracy is improved, but the device complexity increases due to multiple calibration procedures
Solution Approach 1:
The interposer is pre-assembled with the space transformer and probe assembly before being mounted on the holding member. Connection terminals are pre-calibrated and pre-positioned during this preliminary assembly phase, ensuring electrical connection accuracy is established before final installation. This preliminary action reduces the need for multiple calibration procedures during subsequent maintenance operations.
4Ease of repair
If the interposer is detachably mounted on the holding member, then the ease of repair is improved, but the device complexity increases due to additional mounting structures
Solution Approach 1:
The interposer is designed as a detachable component with mounting structures that enable separation from the holding member. While this adds some structural elements, the segmentation allows the interposer to be removed and replaced as a complete unit with the space transformer and probe assembly, greatly simplifying repair operations compared to a fully integrated design.
Data Source
AI summary
A wafer probe card has an adapter module and a probe module detachably mounted together. The adapter module has a holding member and an interposer mounted within the holding plate. The probe module has a frame assembly and a space transformer and a probe assembly mounted within the frame assembly. A fixing plate is mounted on the holding member of the adapter module to constitute an electrical connection among the interposer, space transformer and probe assembly. When any element of the wafer probe card is faulty, the adapter module or the probe module is detached and the faulty element is replaced. The adapter module or the probe module with the replaced element is then reassembled. Alternatively, the adapter module or the probe module can be replaced on a modular basis. Accordingly, it is not necessary that all components be detached entirely, thereby improving the operational speed and efficiency.


