Modulated-Pitch IDT Capacitor for Low-Spurious Acoustic Filters

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Solution Overview

Problem

Existing acoustic wave filters face challenges in meeting filter specifications for steep skirts and low insertion loss near band edges, particularly in achieving desired electrical characteristics while minimizing resonance and loss.

Innovation Solution

The integration of an interdigital transducer (IDT) capacitor with modulated pitch and high viscosity material, which includes capacitor fingers with varying pitches and no acoustic reflectors, to minimize resonance and improve skirt performance and insertion loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If an interdigital transducer capacitor with uniform pitch is used, then the device structure is simple and easy to manufacture, but it generates spurious responses and mechanical resonance that degrade filter performance

Engineering Contradiction:
Improvecapacitor fabrication simplicityVSAvoidspurious responses
Core Design Contradiction:
Ease of manufactureVSObject-generated harmful factors

Solution Approach 1:

The capacitor fingers are designed with non-uniform pitch where different regions have different pitch values. Specifically, the pitch varies along the length of the capacitor fingers, creating local variations that prevent coherent acoustic wave generation at spurious frequencies while maintaining acceptable manufacturing complexity

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The capacitor structure employs asymmetric pitch distribution where the spacing between adjacent capacitor fingers is intentionally made non-uniform. This asymmetry disrupts the periodicity that would otherwise generate strong acoustic resonance, thereby reducing spurious responses without requiring complete structural complexity

Inventive Principle:
Principle #4Asymmetry

2Object-generated harmful factors

If acoustic reflectors are added to the capacitor to reduce resonance, then spurious responses are reduced, but the device complexity increases

Engineering Contradiction:
Improvemechanical resonanceVSAvoidcapacitor structure complexity
Core Design Contradiction:
Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The patent extracts and removes the acoustic reflector elements from the capacitor structure. By eliminating these additional components that would normally be used to suppress resonance, the design achieves reduced spurious responses through the pitch modulation of the capacitor fingers alone, thereby maintaining lower device complexity

Inventive Principle:
Principle #2Taking out (Extraction)

3Object-generated harmful factors

If the capacitor pitch is modulated to reduce spurious responses, then filter skirt performance is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveskirt performance degradationVSAvoidpitch control precision
Core Design Contradiction:
Object-generated harmful factorsVSManufacturing precision

Solution Approach 1:

The pitch parameter of the capacitor fingers is systematically varied across different regions and orientations. By changing the pitch parameter in a controlled non-uniform pattern, the design improves filter skirt performance through reduced acoustic resonance while the variations remain within manufacturable tolerances

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces spurious responses and maintains desired electrical characteristics by dampening mechanical resonance, resulting in improved filter performance with reduced unwanted frequency responses.

Implementation Method 1

The capacitor fingers can be positioned between the high viscosity material and the piezoelectric layer. The high viscosity material can have a higher viscosity than the piezoelectric layer.

Methodology Applied
Scientific EffectViscous damping: Viscous Damping

Implementation Method 2

an interdigital transducer capacitor in the first region, and an acoustic wave resonator in the second region. The interdigital transducer capacitor including capacitor fingers

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS20250379558A1Interdigital transducer capacitor with modulated pitch
Publication Date: 2025.12.11 SKYWORKS SOLUTIONS INC
  • US20250379558A1 patent drawing
  • US20250379558A1 patent drawing
  • US20250379558A1 patent drawing

AI summary

Aspects of this disclosure relate to an interdigital transducer capacitor that includes capacitor fingers with different pitches between pairs of adjacent capacitor fingers. In certain embodiments, the interdigital transducer capacitor and an acoustic wave resonator can be formed of different regions of a piezoelectric layer. Related acoustic wave devices, filters, multiplexers, radio frequency modules, radio frequency systems, wireless communication devices, and methods are disclosed.