Modulating Valve Flow Divider for Semiconductor Fluid Ratio Control
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Solution Overview
Problem
Existing fluid processing systems in semiconductor manufacturing require complex and costly multiple mass flow controllers (MFCs) to divide process fluids in desired ratios, which are not effective for multiple process fluids or fluid mixtures, leading to high installation, operation, and maintenance costs.
Innovation Solution
A system and method using modulating valves and a controller to divide the flow of process fluids from a single inlet to multiple outlets in a predetermined ratio, with optional pressure monitoring to adjust flow, reducing the need for multiple MFCs and simplifying control systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple mass flow controllers (MFCs) are used to divide process fluid flow in desired ratios, then flow division accuracy is improved, but device complexity and cost increase
Solution Approach 1:
The patent combines multiple MFC functions into a single MFC by integrating a flow divider and control valves downstream. Instead of using multiple MFCs (one for each outlet), the system uses one MFC to control total flow, then divides it through controlled valves that regulate flow to each outlet based on predetermined ratios
Solution Approach 2:
The patent segments the flow control function into two parts: (1) total flow control at the inlet through a single MFC, and (2) flow distribution to multiple outlets through controlled valves. This segmentation allows one MFC to replace multiple MFCs while maintaining flow division accuracy
2Reliability
If multiple mass flow controllers (MFCs) are used to divide process fluid flow, then flow control capability is improved, but installation and maintenance costs increase
Solution Approach 1:
The single MFC in the invention performs multiple functions: controlling total flow to all outlets and working in conjunction with control valves to distribute flow to each outlet in predetermined ratios. This multi-functionality reduces the number of components needed, lowering installation and maintenance costs while maintaining flow control capability
3Measurement precision
If multiple mass flow controllers (MFCs) are used for different process fluids, then fluid-specific calibration is achieved, but adaptability to multiple fluids decreases
Solution Approach 1:
The system uses a single MFC that can be calibrated for one process fluid at a time, but the overall system becomes adaptable to multiple fluids by recalibrating the single MFC and adjusting the control valves. This approach provides versatility across different fluids while maintaining calibration accuracy through proper setup
4Measurement precision
If multiple mass flow controllers (MFCs) are used to control process fluids, then flow measurement accuracy is improved, but operation and maintenance costs increase
Solution Approach 1:
The patent merges the flow measurement and control functions into a single MFC combined with downstream control valves. This reduces the number of expensive MFC components from multiple units to just one, lowering operation and maintenance costs while preserving flow measurement accuracy through the coordinated operation of the MFC and valves
Data Source
AI summary
A system and method for dividing the flow of one or more process fluids in a predetermined flow ratio is provided herein. In one embodiment, a system for dividing flow of one or more process fluids in a predetermined flow ratio includes a process chamber having a plurality of inlets for delivering one or more process fluids into the process chamber; a plurality of modulating valves coupled to the plurality of inlets, wherein each inlet of the plurality of inlets is coupled to at least one modulating valve; and a controller coupled to the plurality of modulating valves, the controller configured to control the operation of the plurality of modulating valves to divide the flow of one or more process fluids in the predetermined flow ratio.