Heater Structure for Optical Modulator Thermal Efficiency

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Solution Overview

Problem

Modulator devices in optical circuits face inefficiencies in thermal management, leading to increased power consumption and reduced thermal efficiency due to heat radiation in all directions, which affects the phase shift of light passing through waveguides.

Innovation Solution

A modulator device design featuring a heater structure that directly overlies and laterally surrounds the waveguide, utilizing an upper conductive body and a heater pillar structure to focus heat towards the waveguide, thereby increasing thermal efficiency and reducing power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a conventional heater structure is used that radiates heat in all directions, then the waveguide can be heated, but thermal efficiency is reduced and power consumption increases

Engineering Contradiction:
Improvethermal efficiencyVSAvoidpower consumption
Core Design Contradiction:
Loss of energyVSUse of energy by stationary object

Solution Approach 1:

The heater structure is designed with different regions having different thermal properties. The heater pillars directly contact the waveguide to provide focused heating, while the conductive layer extends laterally to provide thermal anchoring and heat sinking. This local differentiation of thermal quality allows efficient heat transfer to the waveguide while preventing excessive heat radiation in other directions, thereby improving thermal efficiency and reducing power consumption.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The heater structure is segmented into distinct functional components: heater pillars that directly contact the waveguide for focused heating, and a laterally extending conductive layer that provides thermal anchoring. This segmentation allows each component to perform its specific thermal function optimally, with the pillars delivering heat efficiently and the conductive layer managing excess heat, thus resolving the contradiction between thermal efficiency and power consumption.

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If heat is radiated in all directions, then the heater can function, but the heat is not confined to the active region of the waveguide, reducing modulation precision

Engineering Contradiction:
Improvemodulation precisionVSAvoidheat confinement
Core Design Contradiction:
Manufacturing precisionVSLoss of energy

Solution Approach 1:

The heater structure implements local quality by concentrating heating functionality at the heater pillars that directly contact the active region of the waveguide, while the conductive layer provides lateral thermal management. This ensures heat is precisely confined to where it is needed for modulation, improving manufacturing precision and modulation precision without excessive heat loss in other directions.

Inventive Principle:
Principle #3Local quality

3Loss of energy

If the heater structure is simplified, then manufacturing is easier, but thermal efficiency is reduced

Engineering Contradiction:
Improvethermal efficiencyVSAvoidheater structure fabrication
Core Design Contradiction:
Loss of energyVSEase of manufacture

Solution Approach 1:

The heater structure merges two functional elements into a single integrated structure: the heater pillars and the conductive layer form a unified heater assembly that can be fabricated as one component. This merging maintains the thermal efficiency benefits of both the focused heating pillars and the lateral heat management conductive layer, while simplifying manufacturing compared to having separate components. The integrated structure reduces assembly steps and potential alignment issues.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances thermal efficiency by confining heat to the active region of the waveguide, reducing power consumption and improving the modulation of light phase shifts, thus enhancing the overall performance of the modulator device.

Implementation Method 1

a heater structure that directly overlies and at least partially laterally surrounds the waveguide structure... configured to focus heat towards the waveguide structure... changing the phase of light passing through the waveguide structure

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

a heater structure that directly overlies and at least partially laterally surrounds the waveguide structure... configured to focus heat towards the waveguide structure

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS11714299B2Heater structure configured to improve thermal efficiency in a modulator device
Publication Date: 2023.08.01 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11714299B2 patent drawing
  • US11714299B2 patent drawing
  • US11714299B2 patent drawing

AI summary

Various embodiments of the present disclosure are directed towards an integrated chip including a waveguide and a heater structure. The waveguide is disposed on a substrate and comprises an active region that extends continuously along a first distance. The heater structure overlies the waveguide. The heater structure comprises a conductive structure over the active region and a vertical structure disposed between the conductive structure and the substrate. The vertical structure comprises a conductive upper vertical segment and a lower vertical segment. The conductive structure and the conductive upper vertical segment continuously laterally extend across a second distance that is greater than or equal to the first distance. The first distance is greater than a width of the conductive structure.