Module Controller Auto-Registration for Substrate Processing Systems
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Solution Overview
Problem
Existing substrate processing systems require lengthy configuration file modifications and reboots to integrate new devices, leading to temperature and atmosphere fluctuations in processing chambers, which slows down substrate processing.
Innovation Solution
A substrate processing system with a main control unit and module controller that automatically adds ID and detail information of new devices to the configuration and list files, allowing the module controller to control the new device without manual intervention, using a computer-readable storage medium to execute the registration process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual configuration file modification and reboot is performed to integrate a new device, then the device can be controlled by the module controller, but the time required for integration is long and processing conditions become unstable
Solution Approach 1:
The system performs preliminary actions by automatically detecting new devices and pre-configuring their information in the list file before actual substrate processing begins. The module controller continuously monitors for new devices and automatically adds their ID and detail information to the configuration, eliminating the need for manual intervention and lengthy reboots while maintaining stable processing conditions.
2Adaptability or versatility
If the main control unit and module controller are rebooted to add new device information, then the new device can be controlled, but other devices experience temperature changes and atmosphere fluctuations
Solution Approach 1:
The invention extracts the device configuration information management from the main control unit and relocates it to the module controller. The module controller independently manages the list file containing device information, allowing it to add new devices without requiring a reboot of the main control unit. This separation enables new device integration while maintaining stable temperature and atmosphere conditions in the processing chambers.
3Productivity
If manual addition of device information to configuration file is performed, then the new device can be registered, but the operation complexity increases and efficiency decreases
Solution Approach 1:
The module controller performs self-service by automatically detecting newly connected devices and adding their information to the list file without requiring manual intervention. The system autonomously obtains ID information and detail information about new devices, associates them properly, and enables control functionality immediately, thereby improving productivity while maintaining ease of operation.
Data Source
AI summary
A substrate processing system includes a main control unit having a configuration file in which ID information and detail information about devices for processing a substrate is recorded, the detail information includes information needed for controlling the devices, and a module controller having a list file obtained by converting the configuration file into a readable form, the module controller controlling the devices described in the list file on the basis of instructions from the main control unit. The module controller automatically adds, to the list file, ID information and detail information about a new device newly connected to the module controller to establish a condition under which the new device can be controlled.