MOEMS Mirror Array Beam Profiling Across Multiple Axial Positions

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Solution Overview

Problem

Existing laser beam characterization systems are costly, complex, and limited in wavelength range, particularly in multiphoton systems, requiring multiple components and separate beam characterization units for accurate beam profiling and position tracking.

Innovation Solution

A light beam characterization system using a micro-opto-electromechanical system (MOEMS) with an array of mirrors and a controller to perform beam profile measurements on multiple input light beams generated from a single source, allowing characterization at different axial positions using a single unit, combined with cost-effective detectors like single pixel diodes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a position sensitive detector (PSD) is used for beam characterization, then beam position measurement is enabled, but the system becomes costly and limited to a narrow wavelength range (680-1100 nm)

Engineering Contradiction:
Improvebeam position measurementVSAvoidwavelength range
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent replaces the PSD (a specialized detector requiring complex positioning mechanisms) with a simple camera system. The camera captures beam profiles directly through optical paths, eliminating the need for mechanical positioning mechanisms and quadrant detector assemblies. This substitution enables wide wavelength range detection while maintaining measurement precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The camera serves multiple functions: it detects beam profiles, measures beam positions, and characterizes beam characteristics across a wide wavelength range. By making the detector universal rather than specialized, the system achieves both precise measurement and broad adaptability to different wavelengths.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If complete beam characterization is performed using conventional methods, then accurate beam profiling is achieved, but the system requires multiple beam characterization units at different locations, increasing cost and complexity

Engineering Contradiction:
Improvebeam profile accuracyVSAvoidnumber of characterization units
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces a dimensional approach by using multiple optical paths that capture beam profiles at different axial positions simultaneously. Instead of placing multiple characterization units at different locations along the beam path, the system uses optical splitting and imaging to capture multi-position data in a single detection plane, reducing system complexity while maintaining measurement accuracy.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent introduces an optical unit as an intermediary between the light beam and the camera. This optical unit includes optical elements that redirect and image the beam profile onto the camera sensor, enabling single-unit characterization. The optical intermediary processes the beam information to provide complete characterization data without requiring multiple separate measurement devices.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Quantity of substance

If a camera is used for beam detection, then spatial distribution of light can be measured, but complete beam characterization is not possible since detection is limited to a single plane

Engineering Contradiction:
Improvespatial light distribution dataVSAvoidcomplete beam characterization
Core Design Contradiction:
Quantity of substanceVSMeasurement precision

Solution Approach 1:

The patent segments the beam characterization process by capturing multiple beam profiles at different axial positions through separate optical paths. Each optical path provides data from a specific region of the beam, and the camera integrates these segmented measurements to reconstruct the complete three-dimensional beam characteristics, achieving full beam characterization.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from single-plane detection to multi-plane characterization by using optical elements to image different axial positions of the beam onto the camera sensor. This dimensional approach allows the camera to capture spatial distribution data from multiple depths, enabling complete beam characterization including waist position, size, and orientation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise and flexible beam characterization over a wide wavelength range, reducing costs and complexity by using a single unit for multiphoton microscopy applications.

Implementation Method 1

Each mirror is switchable between a first switching state, in which the mirror reflects the light onto the detection device, and at least a second switching state, in which the mirror reflects the light away from the detector device

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

an optical unit configured to direct the light in form of at least two different input light beams onto the micro-opto-electromechanical system

Methodology Applied
Scientific EffectOptical direction: Reflection

Implementation Method 3

a detector device comprising at least one detector unit configured to detect the light

Methodology Applied
Scientific EffectLight detection: Photoelectric Effect

Data Source

PatentEP4528237B1Light beam characterization system
Publication Date: 2026.02.18 LEICA MICROSYSTEMS CMS GMBH
  • EP4528237B1 patent drawingFigure 1
  • EP4528237B1 patent drawingFigure 2~3
  • EP4528237B1 patent drawingFigure 4~5

AI summary

A light beam characterization system (100) for characterizing a light beam emitted by a light source (102) is disclosed. The light beam characterization system (100) comprises a detector device (108) comprising at least one detector unit (110, 112) configured to detect the light (L), and a micro-opto-electromechanical system (104) comprising an array of mirrors (106). Each mirror (106) is switchable between a first switching state, in which the mirror (106) reflects the light onto the detector device (108), and at least a second switching state, in which the mirror (106) reflects the light (L) away from the detector device (108). A controller (114) is configured to cause a beam profile measurement to be performed on the light (L) detected by the at least one detector unit (110, 112) while selectively switching the mirrors (106) between the first and second switching states. The light beam characterization system (100) further comprises an optical unit (116) configured to direct the light (L) in form of at least two different input light beams (L1, L2) onto the micro-opto-electromechanical system (104). The controller (114) is configured to cause the beam profile measurement to be performed on each of the at least two input light beams (L1, L2).