Multi-directional Moire Interferometer Shadow Removal
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Solution Overview
Problem
Conventional projection type moire interferometers struggle with accurately inspecting target objects with complex shapes due to incomplete removal of shadow regions, leading to inaccurate measurements.
Innovation Solution
A multi-directional projection type moire interferometer that employs rotating mirror parts and a grating board with multiple grating elements to emit pattern illumination in various directions, allowing for comprehensive illumination of the target object and reducing manufacturing costs through compact design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If bi-directional pattern illumination is used with fixed projectors, then the device structure is simple, but shadow regions of complex shaped objects cannot be completely removed
Solution Approach 1:
The patent applies the dynamics principle by making the projector system movable and adjustable. Specifically, the projector is mounted on a rotating mechanism that can change its emission direction, and the grating element can be moved to different positions. This dynamic configuration allows the system to illuminate complex objects from multiple directions, effectively removing shadow regions while maintaining a relatively simple device structure.
2Measurement precision
If multiple projectors are added to eliminate shadow regions, then inspection accuracy improves, but device complexity increases
Solution Approach 1:
The patent applies segmentation by dividing the illumination function into temporal segments rather than spatial segments. Instead of using multiple simultaneous projectors, a single projector emits patterned illumination in sequence from different directions, with each direction corresponding to a different phase of the grating element movement. This segmented temporal approach achieves multi-directional illumination without increasing the number of physical projectors.
Solution Approach 2:
The patent makes the single projector universal by enabling it to perform multiple functions: it can emit illumination in different directions, work with different grating element positions, and capture images at different phases. This multi-functionality is achieved through the combination of the rotating projector mechanism and the movable grating element, allowing one projector to replace what would traditionally require multiple fixed projectors.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively removes complex shadow regions and provides accurate 3D shape inspection of target objects by multi-directional illumination, enhancing measurement precision and reducing production costs.
Implementation Method 1
a first rotating mirror part disposed on one side of the image formation part to receive the pattern illumination and change an emission direction of the pattern illumination
Implementation Method 2
a grating element to form the pattern illumination when the illumination is passed through the grating element
Implementation Method 3
Multi-directional projection type moire interferometer and inspection method of using the same
Data Source
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AI summary
A multi-directional projection type moire interferometer capable of multi-directionally emitting the pattern illumination toward a target object and an inspection method of using the same are provided. The multi-directional projection type moire interferometer includes: an XY stage 10 being provided to be movable by a plurality of stage actuators 11 and 12 to move a target object 1 into X and Y directions; an image formation part 110 being provided above the XY stage 10 to take a pattern image that is reflected from the target object 1 placed on the XY stage 10; a first rotating mirror part 120 being provided on one side of the image formation part 110 to receive a pattern illumination, change the optical path of the pattern illumination, and emit the pattern illumination; a second rotating mirror part 130 being provided on another side of the image formation part 110 to receive a pattern illumination, change the optical path of the pattern illumination, and emit the pattern illumination; a plurality of first fixed mirror parts 140 and 150 being provided on one side of the first rotating mirror part 120 to emit the pattern illumination, emitted from the first rotating mirror part 120, toward the target object; a plurality of second fixed mirror parts 160 and 170 being provided on another side of the second rotating mirror part to emit the pattern illumination, emitted from the second rotating mirror part 130, toward the target object; and a first pattern illumination generating part 180 being provided to be capable of emitting the pattern illumination toward the first and the second rotating mirror parts 120 and 130, and generate the pattern illumination.