Mold Deformation for Bubble Reduction in Imprint Lithography
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In imprint and planarization techniques, bubbles between the substrate and mold can lead to defects, and existing methods to reduce bubbles, such as deforming the mold into a convex shape, may damage the substrate or mold, especially when dealing with deficient shot regions on the substrate.
Innovation Solution
A method involving a mold with a cavity that supplies gas to deform the contact surface into a convex shape and tilt relative to the substrate, allowing controlled contact and increased deformation after initial contact to reduce bubbles while avoiding edge collisions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the deformation amount of the contact surface into the convex shape is increased to reduce bubbles, then the tilt amount of the mold should be increased accordingly, but the substrate and the mold may come into contact with each other causing damage
Solution Approach 1:
The mold is tilted at a predetermined angle before contact to define a safe contact region, preventing edge collision while allowing sufficient convex deformation for bubble reduction. This preliminary positioning enables the subsequent pressing action to proceed safely.
Solution Approach 2:
The contact between mold and substrate is localized to a specific region determined by the tilt angle, rather than involving the entire substrate surface. This localized contact approach allows high convex deformation in the contact region for bubble elimination while keeping the mold edge away from the substrate edge.
2Object-affected harmful factors
If the mold is tilted to avoid contact with substrate edge, then the deformation amount of the contact surface must be limited, but this results in insufficient bubble reduction
Solution Approach 1:
The mold is pre-positioned in a tilted state before the pressing action begins. This preliminary tilt establishes a safe geometric relationship between mold and substrate that allows maximum convex deformation without edge contact.
Solution Approach 2:
The mold transitions from a tilted pre-contact state to a pressed contact state, maintaining dynamic control over the contact region. This allows the contact surface to deform significantly into the convex shape needed for bubble elimination while the tilt prevents edge collision.
3Productivity
If the mold comes into contact with the edge of the substrate to process deficient shot regions, then productivity is improved, but the mold and/or substrate may be damaged
Solution Approach 1:
The mold is deliberately positioned asymmetrically with respect to the substrate by tilting it at a predetermined angle. This asymmetric positioning allows the mold to cover deficient shot regions in the peripheral portion of the substrate while the tilt angle ensures the mold edge does not contact the substrate edge, preventing damage.
4Manufacturing precision
If the contact surface is deformed into a convex shape to gradually bring composition and contact surface into contact, then bubbles are reduced, but the process complexity increases
Solution Approach 1:
A gas supply mechanism is used to deform the contact surface into the convex shape. This pneumatic approach provides simple, controlled deformation without complex mechanical actuation systems, achieving gradual contact and bubble reduction through pressure control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces bubble-related defects and allows for accurate formation of compositions on substrates, including deficient shot regions, by increasing the deformation of the mold's contact surface and adjusting its tilt during the contact process.
Implementation Method 1
supplying a gas into the cavity so as to increase a pressure in the cavity to deform the contact surface into a convex shape toward the substrate
Implementation Method 2
the composition on the substrate and the contact surface can be gradually brought into contact with each other from a part of the contact surface of the mold toward the outside so as to extrude the gas between the mold and the substrate to the outside
Data Source
AI summary
The present invention provide a forming method of forming a composition on a substrate using a mold, wherein the mold has a contact surface and a cavity, the method comprising: supplying a gas into the cavity so as to increase a pressure in the cavity to deform the contact surface into a convex shape toward the substrate; relatively tilting the mold with respect to the substrate; bringing the contact surface and the composition on the substrate into contact with each other in a state in which the contact surface has been deformed in the supplying the gas and the mold has been tilted in the relatively tilting; and further supplying the gas into the cavity so as to increase a deformation amount of the contact surface after the contact surface and the composition start to contact each other in the bringing.