Mold Deformation Mechanism for Precise Imprint Alignment
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Solution Overview
Problem
Existing imprint apparatuses face alignment errors due to individual differences in mold dimensions, affecting the stroke and force applied by the mold deformation mechanism, which compromises the accuracy of pattern correction on the mold.
Innovation Solution
An imprint apparatus with a mold deformation mechanism that includes an actuator, a first member driven by the actuator, and a second member to press the mold's side surfaces, utilizing a load cell to measure and adjust the force applied, and a mechanism to switch between connected and non-connected states to compensate for mold size variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mold deformation mechanism is used to correct the shape of a pattern formed on the mold, then the pattern formation precision is improved, but alignment errors increase due to individual differences in mold external dimensions
Solution Approach 1:
The patent changes the physical parameters of the pressing member by making it elastically deformable. The pressing member can elastically deform in the vertical direction while maintaining horizontal pressing force, allowing the system to adapt to different mold dimensions. This elastic deformation capability enables the pressing member to compensate for variations in mold external dimensions, thereby maintaining alignment accuracy while correcting pattern shape.
Solution Approach 2:
The pressing member is designed with dynamic characteristics, allowing it to elastically deform during the pressing operation. This dynamic behavior enables the system to adapt to different mold sizes and maintain optimal contact force, resolving the contradiction between maintaining alignment accuracy and achieving pattern correction across molds with individual dimensional differences.
2Adaptability or versatility
If the stroke of the pressing member is increased to accommodate larger mold variations, then adaptability to different mold dimensions is improved, but the alignment accuracy deteriorates
Solution Approach 1:
The pressing member's elastic modulus and deformation characteristics are optimized to provide adaptability to different mold dimensions while maintaining alignment accuracy. The elastic deformation capability allows the pressing member to adapt to varying mold sizes without requiring excessive stroke, thereby preventing alignment errors.
Solution Approach 2:
The pressing member is functionally segmented into different deformation modes: vertical elastic deformation to accommodate mold size variations and horizontal force application for alignment maintenance. This functional segmentation allows independent optimization of each aspect, achieving both adaptability and alignment accuracy.
Data Source
AI summary
An imprint apparatus for forming a pattern on an imprint material on a substrate using a mold, includes a holder configured to hold the mold, and a deformation mechanism configured to deform the mold by applying a force to a side surface of the mold held by the holder, wherein the deformation mechanism includes an actuator, a first member driven by the actuator, and a second member configured to press the side surface of the mold along with driving of the first member by the actuator.