Mold Light-Blocking Member for Nanoimprint Resin Curing Control

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Solution Overview

Problem

In nanoimprint technology, the photocurable resin material adheres to the mold and is excessively exposed to light, leading to unwanted curing and potential damage during the release of the mold, especially in step-and-repeat processes where the imprint pattern is exposed to light before processing.

Innovation Solution

A mold with a light-blocking member is used to prevent unwanted curing by blocking light from reaching the non-pattern portions, ensuring that only the intended areas are cured, thereby reducing the force on the mold and workpiece during release and preventing deformation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If light is used to cure the photocurable resin material during imprinting, then the imprint pattern is transferred onto the workpiece, but the photocurable resin material in non-pattern areas is excessively exposed to light and cured unintentionally

Engineering Contradiction:

Improveimprint pattern transfer precisionVSAvoidunwanted curing of resin material

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The mold is segmented into pattern areas and non-pattern areas, with the light-blocking member specifically positioned at the non-pattern areas to selectively block light exposure in those regions while allowing light to pass through the pattern areas for proper curing

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A light-blocking member is introduced as an intermediary element between the light source and the non-pattern areas of the workpiece, preventing excessive light exposure and unwanted curing in those regions while maintaining the imaging function in pattern areas

Inventive Principle:

Principle #24Intermediary (Mediator)

2Productivity

If the photocurable resin material is cured in non-pattern areas, then the light exposure process is simplified, but the cured resin material adheres to the mold and causes damage during release

Engineering Contradiction:

Improvelight exposure efficiencyVSAvoidmold and workpiece integrity

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The harmful effect of unwanted curing in non-pattern areas is extracted and eliminated by introducing the light-blocking member, which removes the adverse effect of excessive light exposure and prevents resin material from adhering to the mold in non-pattern regions

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The light-blocking member is positioned in advance on the mold to prevent unwanted curing before it occurs, applying a counter-action to the excessive light exposure and preventing the harmful adhesion effect during the release process

Inventive Principle:

Principle #9Preliminary anti-action

3Stability of the object's composition

If light passes through the outside of the mold during exposure, then the entire resin layer is cured, but the resin material outside the imprint pattern area deforms into an undesirable shape

Engineering Contradiction:

Improveresin material uniformityVSAvoidresin material shape control

Core Design Contradiction:

Stability of the object's compositionVSShape

Solution Approach 1:

Different regions of the workpiece receive different light exposure treatments: pattern areas receive full light exposure for curing, while non-pattern areas have light blocked to prevent curing and shape deformation, creating local quality differences in the resin material processing

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The light-blocking member effectively suppresses curing in areas outside the intended imprint pattern, reducing the risk of mold and workpiece damage and ensuring precise pattern transfer, even in step-and-repeat methods.

Implementation Method 1

a light-blocking member, disposed at the non-pattern portion, for decreasing an amount of light with which the member to be processed is irradiated through the non-pattern portion

Methodology Applied

Scientific EffectLight blocking: Absorption (EM radiation)

Implementation Method 2

the resin layer is irradiated with ultraviolet light to cure the photocurable resin material

Methodology Applied

Scientific EffectPhotocuring: Photopolymerisation

Data Source

PatentUS8011916B2Mold, imprint apparatus, and process for producing structure

Publication Date: 2011.09.06 CANON KK

AI summary

In order to alleviate or suppress curing of a photocurable resin material in an area in which the curing of the photocurable resin material is not intended, exposure of the photocurable resin material to light is suppressed through a non-pattern portion at which a light-blocking member is provided by means of a mold having an imprint pattern portion and the non-pattern portion or is suppressed by disposing a light-blocking member so as not to irradiate the photocurable resin material with light not via the mold.