Molded EMIB Bridge with Graded CTE for Thermomechanical Stability

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Solution Overview

Problem

Embedded multi-die interconnect bridges (EMIBs) face thermomechanical issues such as heat-induced stresses, warpage, and delamination due to the mismatch in coefficient of thermal expansion (CTE) between the silicon bridge and the substrate, limiting the size of the embedded bridge and restricting high-speed input/output signaling.

Innovation Solution

A molded fine line and spaced (FLS) interconnect bridge with graded CTEs is employed to minimize CTE mismatch, using low-cost substrate and molded embedded pane-level ball (EPLB) grid array packaging processes, allowing for wider design flexibility and improved thermal management.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a silicon bridge is used in EMIB, then high-density die-to-die connections are enabled, but thermomechanical issues such as heat induced stresses, warpage, and delamination occur due to CTE mismatch

Engineering Contradiction:
Improvehigh-density interconnect precisionVSAvoidthermomechanical reliability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent changes the material parameter (CTE) of the bridge from silicon (low CTE) to an organic material with CTE matched to the substrate. This parameter change eliminates the CTE mismatch problem while maintaining the high-density interconnect capability, thereby resolving the contradiction between manufacturing precision and thermomechanical reliability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses composite material structures including the organic bridge material integrated with the organic substrate, and employs multiple dielectric layers with conductive vias to create a composite interconnect system. This composite approach allows for CTE matching while achieving high-density connections, resolving the technical contradiction

Inventive Principle:
Principle #40Composite materials

2Productivity

If the bridge size is increased to enhance performance, then more I/O signals can be supported, but thermomechanical stresses and warpage increase due to CTE mismatch

Engineering Contradiction:
ImproveI/O signaling capacityVSAvoidthermomechanical stresses
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

By changing the CTE parameter of the bridge material to match the substrate, the patent enables larger bridge sizes to be used without increasing thermomechanical stresses. This allows higher I/O signaling capacity to be achieved without the harmful thermomechanical effects that would normally limit bridge size

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies preliminary anti-action by pre-matching the CTE of the bridge material to the substrate before assembly. This preliminary design choice prevents thermomechanical stresses and warpage from developing during subsequent thermal cycles, enabling larger bridge sizes for enhanced productivity

Inventive Principle:
Principle #9Preliminary anti-action

3Ease of manufacture

If silicon design rules are used for the bridge, then silicon manufacturing processes can be applied, but creation of metal reference planes is restricted which limits high-speed signaling

Engineering Contradiction:
Improvesilicon fabrication compatibilityVSAvoidhigh-speed signaling flexibility
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent changes the material system from silicon-based to organic-based, which changes the design rules and manufacturing parameters. This allows metal reference planes to be created using organic substrate technologies, enabling high-speed signaling while maintaining ease of manufacture through established organic PCB and substrate processes

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces expensive silicon interposer technology with lower-cost organic substrate technology. This substitution achieves the same high-density interconnect function at lower cost and with greater design flexibility for metal reference planes, resolving the contradiction between manufacturing ease and signaling adaptability

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively balances CTE mismatch, reduces thermomechanical stresses, and enables larger embedded bridge sizes, while providing flexibility for high-speed signaling, thus enhancing the performance and reliability of EMIB substrates.

Implementation Method 1

thermomechanical issues such as heat induced stresses, warpage, delamination, etc both within the substrate as well as post flip chip attachment

Methodology Applied
Scientific EffectCoefficient of thermal expansion (CTE) mismatch: Thermal Expansion

Data Source

PatentEP3479398B1Molded embedded bridge for enhanced EMIB applications
Publication Date: 2025.02.19 INTEL CORP
  • EP3479398B1 patent drawingFigure 1~2
  • EP3479398B1 patent drawingFigure 3~4A
  • EP3479398B1 patent drawingFigure 4B~5

AI summary

Disclosed is an embedded multi-die interconnect bridge (EMIB) substrate. The EMIB substrate can comprise an organic substrate, a bridge embedded in the organic substrate and a plurality of routing layers. The plurality of routing layers can be embedded within the bridge. Each routing layer can have a plurality of traces. Each of the plurality of routing layers can have a coefficient of thermal expansion (CTE) that varies from an adjacent routing layer.