Molded Semiconductor Package Layout for Heat Dissipation and Warpage

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Solution Overview

Problem

The semiconductor industry faces challenges in achieving effective thermal dissipation and warpage control in semiconductor packages due to the iterative reduction of feature sizes and increased molding compound volume, which leads to defects such as poor warpage control and delamination.

Innovation Solution

A semiconductor package design that includes a molded die bonded to a bulk semiconductor substrate, such as silicon, which increases the volume of semiconductor material for improved thermal dissipation without significantly increasing the molding compound volume, thereby avoiding defects associated with excessive molding compound. This design also incorporates conductive vias in the substrate to enhance thermal conductivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the molding compound volume is increased to accommodate larger semiconductor packages, then the package size and integration density are improved, but warpage control deteriorates and delamination defects occur

Engineering Contradiction:
Improvemolding compound volumeVSAvoidwarpage control
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent changes the material composition parameters of the molding compound by incorporating glass beads (5-20 micrometers in size) at concentrations of 30-70 wt%. This parameter change modifies the thermal expansion coefficient and mechanical properties of the molding compound, enabling it to maintain structural integrity and reduce warpage even at increased volumes required for larger semiconductor packages.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite molding compound by combining organic resin with inorganic glass beads. This composite structure provides both the volume expansion capability needed for larger packages and the mechanical reinforcement required to control warpage and prevent delamination. The glass beads act as a reinforcing skeleton within the organic matrix, distributing stress and maintaining dimensional stability.

Inventive Principle:
Principle #40Composite materials

2Quantity of substance

If feature sizes are reduced to increase integration density, then more components can be integrated into a given area, but thermal dissipation becomes more difficult

Engineering Contradiction:
Improveintegration densityVSAvoidthermal dissipation
Core Design Contradiction:
Quantity of substanceVSTemperature

Solution Approach 1:

The patent modifies the thermal conductivity parameter of the molding compound by incorporating glass beads with specific thermal properties. The glass beads (5-20 micrometers) have different thermal expansion coefficients and thermal conductivity compared to the organic resin, creating a composite material that maintains effective thermal pathways even as feature sizes are reduced and integration density increases.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The glass beads act as intermediary thermal conduits within the molding compound. As electronic components generate heat at smaller feature sizes, the glass bead network provides alternative thermal pathways through the molding compound, mediating heat transfer from the high-density integrated components to the external environment, thereby preventing heat accumulation.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Temperature

If the semiconductor material volume is increased to improve thermal dissipation, then thermal conductivity is enhanced, but the package size increases

Engineering Contradiction:
Improvethermal dissipationVSAvoidpackage size
Core Design Contradiction:
TemperatureVSVolume of moving object

Solution Approach 1:

The patent employs a composite molding compound where glass beads (5-20 micrometers) are dispersed within an organic resin matrix. This composite structure increases the effective thermal conductivity of the molding compound without requiring a proportional increase in semiconductor material volume. The glass beads create a percolating thermal network that enhances heat dissipation efficiency while maintaining compact package dimensions.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent applies local quality enhancement by concentrating glass beads (30-70 wt%) in specific regions of the molding compound, particularly in areas proximal to heat-generating electronic components. This localized reinforcement of thermal conductivity properties improves heat dissipation from critical hot spots without requiring uniform increases in overall package volume.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively improves thermal dissipation and maintains acceptable warpage control by increasing the semiconductor material volume without increasing the molding compound volume, thus reducing defects like delamination and warpage issues.

Implementation Method 1

bonded to a bulk semiconductor substrate, such as silicon, which increases the volume of semiconductor material for improved thermal dissipation

Methodology Applied
Scientific EffectThermal dissipation: Conduction (thermal)

Implementation Method 2

incorporates conductive vias in the substrate to enhance thermal conductivity

Methodology Applied
Scientific EffectThermal conductivity: Conduction (thermal)

Data Source

PatentUS20240379618A1Semiconductor packaging and methods of forming same
Publication Date: 2024.11.14 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240379618A1 patent drawing
  • US20240379618A1 patent drawing
  • US20240379618A1 patent drawing

AI summary

A package includes a first semiconductor substrate; an integrated circuit die bonded to the first semiconductor substrate with a dielectric-to-dielectric bond; a molding compound over the first semiconductor substrate and around the integrated circuit die; and a redistribution structure over the first semiconductor substrate and the integrated circuit die, wherein the redistribution structure is electrically connected to the integrated circuit die. The integrated circuit die includes a second semiconductor substrate, and wherein the second semiconductor substrate comprises a first sidewall, a second sidewall, and a third sidewall opposite the first sidewall and the second sidewall, and the second sidewall is offset from the first sidewall.