Sulfonated Polymer Cleaning Liquid for Molybdenum CMP Defects
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Solution Overview
Problem
Existing treatment liquids for semiconductor substrates with molybdenum-containing substances after chemical mechanical polishing struggle to provide both effective anticorrosion properties and defect removability, leading to performance issues and yield reduction.
Innovation Solution
A treatment liquid comprising a polymer with sulfonic acid groups or salts, optionally with carboxy groups, and water, with specific molecular weight and molar ratios, along with optional organic acids and amino acids, is used to enhance anticorrosion properties and defect removability on molybdenum-containing substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional treatment liquids containing organic acids, sulfonic acid-type anionic surfactants, and polymer coagulating agents are used for cleaning molybdenum-containing substrates after CMP treatment, then defect removability is improved, but anticorrosion properties for molybdenum deteriorate
Solution Approach 1:
The patent changes the chemical parameters of the treatment liquid by replacing conventional organic acids and anionic surfactants with carboxylic acid-type chelating agents having specific molecular weights (100-10,000). This parameter change enables the liquid to simultaneously achieve defect removability and anticorrosion properties for molybdenum substrates after CMP treatment
Solution Approach 2:
The patent creates a composite treatment liquid system combining carboxylic acid-type chelating agents with specific molecular weights, optional amino acids, and controlled pH ranges (2-12). This composite formulation synergistically provides both defect removal capability and corrosion protection for molybdenum-containing substrates
2Productivity
If treatment liquids are formulated to enhance defect removability on molybdenum-containing substrates, then cleaning effectiveness is improved, but corrosion of molybdenum increases
Solution Approach 1:
The patent introduces carboxylic acid-type chelating agents as intermediary substances that mediate between the cleaning liquid and molybdenum substrate. These chelating agents bind to metal ions and residues, enabling effective defect removal while preventing direct corrosive interaction between the liquid and molybdenum substrate
Solution Approach 2:
The patent optimizes the molecular weight parameter of the carboxylic acid-type chelating agent (100-10,000) to achieve optimal balance between cleaning effectiveness and corrosion prevention. This parameter optimization ensures the chelating agent can effectively bind residues while maintaining protective function on the molybdenum substrate
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The treatment liquid effectively improves anticorrosion properties and defect removability on molybdenum-containing substrates, ensuring better performance and yield in semiconductor manufacturing.
Implementation Method 1
a polymer having a sulfonic acid group or a salt thereof
Implementation Method 2
anticorrosion properties for molybdenum
Data Source
AI summary
The present invention provides a treatment liquid which is excellent in anticorrosion properties for molybdenum and excellent in defect removability on an object to be treated, in a case of being applied to cleaning of the object to be treated, which contains a molybdenum-containing substance and has been subjected to chemical mechanical polishing treatment. In addition, the present invention provides a cleaning method for an object to be treated, using the above-described treatment liquid, and a method for manufacturing an electronic device. The treatment liquid of the present invention is used for cleaning an object to be treated, which contains a molybdenum-containing substance and has been subjected to chemical mechanical polishing, the treatment liquid containing a polymer having a sulfonic acid group or a salt thereof, and water.