Molybdenum Oxy Halide Synthesis for Ultra-Pure Precursor Vapors
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Solution Overview
Problem
The presence of contaminants in precursor vapors, particularly particles and vapors, poses a challenge in semiconductor fabrication and manufacturing, necessitating improved methods for synthesizing and purifying molybdenum compounds to enhance purity and reduce impurities.
Innovation Solution
A method involving the use of low-melting-point eutectic mixtures of metal halide compounds and metal trioxide compounds under controlled temperature and pressure conditions to form high-purity molybdenum oxy halide compounds, avoiding the use of chlorine gas and elevated pressures, thereby minimizing trace metals and moisture impurities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional methods are used to synthesize molybdenum compounds, then production can proceed under standard conditions, but the resulting compounds contain contaminants such as particles and vapors that reduce purity
Solution Approach 1:
The patent employs an inert atmosphere environment during the synthesis process to prevent contamination of molybdenum compounds. By conducting reactions in an inert gas atmosphere, the method excludes moisture and oxygen that could introduce impurities, thereby achieving high purity compounds with at least 99.99969% purity as determined by ICP-MS
Solution Approach 2:
The patent utilizes controlled temperature and pressure parameters to optimize the synthesis process. By maintaining specific temperature ranges and pressure conditions, the method achieves high purity molybdenum compounds while minimizing the formation of particulate and vapor contaminants that would otherwise compromise product quality
2Productivity
If chlorine gas and elevated pressures are used in synthesis, then reaction efficiency can be improved, but trace metals and moisture impurities increase
Solution Approach 1:
The patent extracts or eliminates chlorine gas from the synthesis process by using alternative reagents that do not require chlorine gas. This substitution removes the source of chloride-related impurities and trace metal contamination while maintaining reaction efficiency through carefully selected alternative chemistry that proceeds under milder pressure conditions
Solution Approach 2:
The patent employs disposable or single-use reaction vessels and components that are designed to be discarded after one use. This approach prevents cross-contamination from previous reactions and eliminates the need for extensive cleaning procedures that could introduce moisture and trace metal impurities, thereby maintaining high purity levels
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method achieves molybdenum compounds with purities of at least 99.99969% by weight, reducing impurities such as trace metals and moisture, suitable for semiconductor applications.
Implementation Method 1
contacting the reagent and the metal trioxide compound sufficient to form a reaction product of the formula: MO2X2
Data Source
AI summary
Methods for synthesizing and/or purifying molybdenum compounds are provided. A method comprises obtaining a reagent; obtaining a metal trioxide compound; and contacting the reagent and the metal trioxide compound sufficient to form a reaction product comprising a molybdenum compound. Related compositions, related systems, and other related methods are provided, among other things.