MOMS Sensor SiN Arm Suspension for Displacement Sensitivity
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Solution Overview
Problem
Micro-opto-mechanical system (MOMS) sensors face challenges in maintaining high sensitivity while supporting large membrane displacement, as increased displacement leads to reduced sensitivity at small energy levels and increased forces that may cause sensor breakage.
Innovation Solution
A MOMS sensor design featuring a fiber interface with SiN arms that anchor a movable element within a cavity, allowing for robust and sensitive suspension, along with controlled atmosphere and optical communication, supports large displacement while maintaining sensitivity through the use of SiN arms and encapsulation techniques.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If the membrane displacement is increased to support large displacement, then the sensitivity at small energy levels is reduced
Solution Approach 1:
The system is divided into two distinct functional components: a membrane optimized for large displacement capability and a mirror optimized for sensitivity and optical performance. The membrane handles the large mechanical movement while the mirror, with its optimized surface, maintains high sensitivity for small energy level detection, thus resolving the contradiction between displacement range and measurement precision.
Solution Approach 2:
The invention transitions from a single-element membrane to a two-element system (membrane + mirror) where the mirror is positioned at the membrane's maximum displacement point. This spatial arrangement allows the system to simultaneously achieve large displacement (through membrane movement) and high sensitivity (through mirror positioning and surface optimization), effectively utilizing dimensional separation to resolve the contradiction.
2Length of moving object
If the membrane displacement is increased to support large displacement, then the forces acting on the membrane increase causing breakage
Solution Approach 1:
The system separates the functions of displacement generation and force bearing. The membrane is designed to enable large displacement with minimal stress, while the mirror and its mounting structure handle the forces associated with large displacement. This segmentation allows the membrane to operate in a low-stress regime while still achieving large displacement, thereby preventing breakage.
Solution Approach 2:
The mirror acts as an intermediary between the membrane and the external environment. It is positioned at the membrane's maximum displacement point, allowing the membrane to achieve large displacement without directly承受 (bearing) the full forces. The mirror and its mounting structure serve as the intermediate element that manages the forces, protecting the membrane from breakage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances sensitivity, frequency bandwidth, and shock resistance, enabling accurate measurement of displacement over a large dynamic range while minimizing the risk of sensor breakage.
Implementation Method 1
the element is movably anchored by SiN arms, which are movable with respect to walls of the cavity
Data Source
AI summary
There is provided a MOMS sensor comprising a fiber interface comprising a fiber passthrough for one or more optical fibers, a cavity comprising an element hermetically encapsulated within the cavity, wherein the element is movably anchored by SiN arms, which are movable with respect to walls of the cavity, wherein the SiN arms comprise anchor portions at first ends of the SiN arms, which are connected to the element, and at second ends of the SiN arms, which are connected to the walls of the cavity, and the fiber interface is configured to receive the fibers through the fiber passthrough into positions for communications of light between the element and the fibers. In this way a robust structure that supports sensitivity of the sensor is provided.