Monoblock Heater Pockets for Substrate Degassing
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Solution Overview
Problem
Existing batch degassing systems for substrates are costly and space-intensive due to the use of multiple heater plates, which limits their efficiency and throughput, especially for highly outgassing materials that require extended degassing times.
Innovation Solution
A degasser chamber with a single metal block featuring multiple pockets for substrate support, each with a non-contact handling opening and a heater interface, allowing for efficient heat exchange and gas treatment without the need for extensive internal heating or cooling networks, and a gas feed line arrangement for improved heat transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If multiple individual heater plates are used for each substrate, then heating capability is improved, but manufacturing cost and space requirements increase
Solution Approach 1:
The patent merges multiple individual heater plates into a single monoblock heater structure that contains multiple pockets for holding substrates. This consolidation maintains the heating capability for multiple substrates simultaneously while reducing the number of separate heating components, thereby lowering manufacturing complexity and space requirements.
Solution Approach 2:
The monoblock heater is segmented into multiple pockets within a single continuous structure. Each pocket can accommodate a substrate and provides localized heating, while the entire heater functions as one integrated unit. This segmentation allows independent thermal zones for each substrate without requiring separate heater plates.
2Reliability
If extended degassing time is provided for highly outgassing substrates, then degassing completeness is improved, but throughput of subsequent processes decreases
Solution Approach 1:
The monoblock heater enables continuous heating of multiple substrates simultaneously in a batch configuration. By providing extended degassing time for all substrates at once through the integrated heating structure, the system achieves complete degassing without creating sequential bottlenecks, thereby maintaining throughput in subsequent vacuum processes.
Solution Approach 2:
The system performs preliminary batch degassing of multiple substrates simultaneously using the monoblock heater before they enter the vacuum deposition sequence. This preliminary treatment ensures all substrates are adequately degassed in advance, preventing delays during the vacuum process and maintaining overall throughput.
3Speed
If pump capacity is increased to remove vapours and gases more quickly, then degassing speed is improved, but the physics of outgassing remains the limiting factor
Solution Approach 1:
The monoblock heater changes the thermal parameter by providing sustained and uniform heating across all substrate pockets. This thermal parameter optimization enhances the outgassing rate from the substrates themselves, addressing the fundamental physics limitation by increasing the vapor pressure differential that drives outgassing, rather than relying solely on pump capacity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables extended degassing times for highly outgassing substrates without sacrificing throughput, while being more cost-effective and space-efficient compared to traditional systems, maintaining thermal equilibrium and uniform heating or cooling across all pockets.
Implementation Method 1
a heat storage block (1) made of a single metal part or of more than one thermally narrowly coupled metal parts
Implementation Method 2
heat storage block (1) made of a single metal part or of more than one thermally narrowly coupled metal parts
Implementation Method 3
a heater interface (4) to the block (1)
Implementation Method 4
Gas feed lines (7) are arranged to dispatch in the pockets (2)
Implementation Method 5
degassing means the removal of gases, especially (i) gases from evaporated liquids like water or (ii) vapours that result from sublimating materials adhering to surfaces or (iii), in vacuum technology, substances that are outgassing from (bulk) material as soon as the surrounding pressure falls below its vapour pressure
Implementation Method 6
degassing means the removal of gases, especially (i) gases from evaporated liquids like water
Data Source
Figure 1~3
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AI summary
A heater or cooler chamber for a batch of more than one workpiece comprises a heat storage block (1). In the block a multitude of pockets (2) are provided, whereby each of the pockets (2) may be closed or opened by a controllably operated door. A heater or cooler arrangement (4) is applied. The pockets (2) are tailored to surround a workpiece applied therein in a non-contact closely spaced manner.