Monocrystalline Graphene Growth on Insulating Substrates

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Solution Overview

Problem

Current methods for producing graphene face challenges in achieving large-area, wafer-scale monocrystalline graphene growth, particularly due to issues with substrate compatibility, uniformity, and orientation, which hinder the commercialization of graphene electronic devices.

Innovation Solution

A method involving the growth of polycrystalline graphene on an insulating substrate using hydrocarbon gases, followed by the formation of a catalyst and subsequent recrystallization through heat-treating, utilizing a zone heating scheme to achieve monocrystalline graphene, with specific temperature ranges and catalysts like aluminum or transition metals to enhance orientation and reduce reaction energy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If graphene is grown on metal substrates using CVD, then graphene layers can be produced, but the graphene cannot be oriented in a specific direction and large-area single crystal growth is impossible

Engineering Contradiction:
Improvegraphene layer areaVSAvoidcrystal orientation uniformity
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The patent uses an insulating substrate as an intermediary medium to enable oriented graphene growth. By introducing a substrate with specific crystal structure (such as sapphire or silicon oxide) as an intermediary layer between the growth environment and the graphene, the substrate's crystal orientation guides the graphene lattice alignment, solving the orientation problem that plagues metal substrate-based CVD methods.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs parameter changes by controlling growth temperature, pressure, and gas flow conditions during CVD to achieve oriented growth on insulating substrates. By optimizing these parameters, the method enables large-area monocrystalline graphene growth that maintains uniform crystal orientation across the entire substrate surface.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If silicon-based semiconductor processes are used for thin layer deposition, then integration can be achieved, but metal atoms become thermodynamically unstable and cannot form uniform layers below 30 nm thickness

Engineering Contradiction:
Improvelayer thickness uniformityVSAvoidmetal layer stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent uses graphene as a disposable intermediate layer that can be grown in large areas with atomic-level uniformity. This graphene layer serves as a temporary but highly effective platform for subsequent device fabrication, replacing the need for unstable metal layers in traditional silicon-based processes for sub-30nm structures.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Quantity of substance

If chemical peeling of graphite compounds is used, then graphite layers can be obtained, but only pieces of several hundred nanometers thickness are achieved and chemical materials cannot be completely removed

Engineering Contradiction:
Improvegraphite layer thicknessVSAvoidlayer thickness control
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The patent replaces mechanical/chemical peeling methods with a controlled chemical vapor deposition process. Instead of physically separating graphite layers using tape or chemicals, the method uses vapor-phase carbon deposition to grow graphene layer-by-layer with precise thickness control, eliminating the need for mechanical intervention and chemical residue removal.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the commercialization of graphene electronic devices by achieving oriented monocrystalline graphene growth on wafer-scale insulating substrates, overcoming previous limitations in substrate compatibility and uniformity, and allowing for efficient production of high-quality graphene layers.

Implementation Method 1

recrystallizing the polycrystalline graphene into monocrystalline graphene by heat-treating the polycrystalline graphene and the catalyst

Methodology Applied
Scientific EffectHeat treatment: Heat Treatment

Implementation Method 2

recrystallizing the polycrystalline graphene into monocrystalline graphene

Methodology Applied
Scientific EffectRecrystallization: Crystallisation

Implementation Method 3

formation of a catalyst and subsequent recrystallization through heat-treating, utilizing a zone heating scheme to achieve monocrystalline graphene, with specific temperature ranges and catalysts like aluminum or transition metals to enhance orientation and reduce reaction energy

Methodology Applied
Scientific EffectCatalysis: Catalysis

Implementation Method 4

zone heating scheme to achieve monocrystalline graphene

Methodology Applied
Scientific EffectTemperature gradient: Temperature Gradient

Data Source

PatentEP3091106B1Method for manufacturing monocrystalline graphene
Publication Date: 2019.02.13 KOREA RES INST OF STANDARDS & SCI
  • EP3091106B1 patent drawingFigure 1~3
  • EP3091106B1 patent drawingFigure 4~5
  • EP3091106B1 patent drawingFigure 6

AI summary

The present invention provides a method for manufacturing a monocrystalline graphene layer, comprising the steps of: forming polycrystalline graphene on a substrate by using a hydrocarbon gas to grow a graphene layer aligned on a wafer-scale insulator substrate in one direction like a monocrystal; forming a catalyst on the polycrystalline graphene; and recrystallizing the polycrystalline graphene to monocrystalline graphene by heat-treating the polycrystalline graphene and the catalyst.