Monolithic Beam Splitter Lens Integration
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Solution Overview
Problem
Existing beam splitter technologies face challenges in precision, alignment, and contamination issues due to the need for accurate assembly of multiple components, which can lead to laser damage and increased costs in high-peak power DUV laser illumination systems.
Innovation Solution
A novel design for a monolithic beam splitter with a focusing lens integrated into a single piece of glass, reducing the number of assembly steps and eliminating the risk of contamination by eliminating the glass-glass interface, using a plano-convex lens and precise cutting and polishing techniques to create a beam splitter cube with a spherical lens.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple separate optical components (beam splitter cube and lens) are used, then the system can achieve the required optical functions, but the assembly complexity increases and contamination risk between components increases
Solution Approach 1:
The patent merges the beam splitter cube and focusing lens into a single monolithic optical component. The beam splitter cube is formed by cutting and polishing a single lens, eliminating the need for separate assembly. This integration removes the glass-glass interface between components, thereby eliminating contamination trapping and reducing assembly complexity while maintaining all required optical functions.
2Manufacturing precision
If multiple separate optical components are assembled, then optical functions can be achieved, but alignment precision becomes difficult to control
Solution Approach 1:
By integrating the lens and beam splitter into a single monolithic component, the patent eliminates alignment issues between separate parts. The lens centering is inherently controlled during the single-piece fabrication process, ensuring precise optical alignment without the complexity of aligning multiple separate components.
3Ease of manufacture
If chemical bonding is used to join optical components, then assembly is simplified, but contamination can be trapped at the interface causing laser damage
Solution Approach 1:
The monolithic design eliminates the need for chemical bonding or adhesive assembly. By forming the beam splitter and lens as one single piece through cutting and polishing, the patent removes the interface where contamination could be trapped. This eliminates the risk of laser-induced damage at bonding interfaces while maintaining ease of manufacture through a single integrated fabrication process.
4Manufacturing precision
If precise assembly of multiple components is required, then optical performance can be optimized, but production time and cost increase
Solution Approach 1:
The patent achieves optical performance optimization by integrating the beam splitter and lens into a single monolithic component fabricated through precise cutting and polishing of a single lens. This eliminates the time-consuming assembly process required for multiple separate components while maintaining the optical precision needed for high-performance applications.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances precision, reduces assembly time and costs, and improves the accuracy of lens centering, while eliminating the risk of contamination and laser damage, resulting in a more robust and cost-effective optical component for DUV applications.
Implementation Method 1
The first surface of the first prism is curved and forms a lens for focusing light either transmitted or reflected by the common interface between the two optical prism elements
Implementation Method 2
The second optical element also in the form of a prism and includes three surfaces, one of which faces the second surface of the first prism and both transmits and reflects light
Data Source
AI summary
A beam splitter includes first and second prisms. The first prism includes first, second, and third optical surfaces. The second prism includes three surfaces, one of which faces the second surface of the first prism and both transmit and reflect light. The first surface of the first prism is curved and forms a lens for focusing light either transmitted or reflected by the common interface between the two prisms. The first prism is from a single piece of material. Fabrication includes making two cuts through a lens to cut-out an intermediate section. A portion of the intermediate section is cut-off to form the third surface of the first prism. The first surface of the first prism corresponds to the curved top surface of the lens. The second surface of the first prism corresponds to the bottom plano surface of the lens. The first and second prisms are then combined.