Additively Manufactured Fluid Component Body for Complex Flow Paths
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Solution Overview
Problem
Existing fluid control systems for semiconductor manufacturing face challenges such as high construction costs, potential leak points, and difficulty in maintaining complex flow path shapes and orientations due to the use of multiple valve manifolds, which are expensive and difficult to machine.
Innovation Solution
A monolithic fluid component body is fabricated using additive manufacturing, comprising discrete valve and conduit segments with integrated flow paths, allowing for complex shapes and orientations, and featuring internal flow path discontinuities to enhance flow properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple valve manifolds are used to control fluid flow, then flow control capability is improved, but manufacturing cost and complexity increase
Solution Approach 1:
The patent combines multiple valve manifolds into a single integrated body with complex internal flow paths. The manifold body includes multiple ports and internal passages that allow fluid distribution to multiple valves without requiring separate manifold components, thereby reducing assembly complexity while maintaining flow control capability.
Solution Approach 2:
The manifold body is designed with segmented functional zones including inlet ports, outlet ports, and internal flow path segments that can be independently configured. This segmentation allows flexible arrangement of flow control paths while using a single monolithic structure, reducing the number of separate components needed.
2Manufacturing precision
If traditional machining is used to create complex flow paths, then manufacturing precision can be achieved, but manufacturing time and cost increase
Solution Approach 1:
The patent replaces traditional mechanical machining processes with additive manufacturing technology. The manifold body is formed by depositing material layer by layer according to digital models, enabling complex internal flow paths to be created without extensive machining operations, thereby reducing manufacturing time while maintaining precision.
Solution Approach 2:
The invention changes the manufacturing approach from subtractive (machining) to additive (deposition) processes. This parameter change in manufacturing methodology allows complex geometries to be built directly, avoiding the time-consuming nature of traditional machining while achieving the required flow path precision.
3Productivity
If polished surface finish is required for flow paths, then fluid flow efficiency is improved, but manufacturing difficulty increases for complex paths
Solution Approach 1:
The patent replaces traditional mechanical polishing processes with additive manufacturing surface formation. The layer-by-layer deposition process can inherently produce smooth surfaces, and any required surface finishing can be applied more easily to the complex geometries created by additive manufacturing compared to traditional machining methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces manufacturing time and costs, minimizes material usage, and improves flow efficiency by incorporating flow path discontinuities, while providing a robust and compact fluid control system.
Implementation Method 1
A monolithic fluid component body is fabricated using additive manufacturing
Implementation Method 2
the upper perimeter wall of the second valve segment includes a portion that is fused with an adjacent portion of the upper perimeter wall of the second valve segment
Implementation Method 3
The conduit end portion is bent from the first direct to a second direction
Implementation Method 4
one or more discontinuities adapted to provide increases in one or more of flow shear, flow compression, and flow incidence
Implementation Method 5
one or more discontinuities adapted to provide increases in one or more of flow shear, flow compression, and flow incidence
Implementation Method 6
one or more discontinuities adapted to provide increases in one or more of flow shear, flow compression, and flow incidence
Data Source
Figure 1
Figure 1A
Figure 2
AI summary
A method of fabricating a fluid component body includes forming a monolithic fluid component body including a valve segment having an annular upper perimeter wall portion defining a valve cavity and a lower base portion defining first and second flow ports, and a conduit segment extending from one of the first and second flow ports and including a conduit end portion defining a tubular portion extending in a first direction and spaced apart from a remainder of the fluid component body. The conduit end portion is bent from the first direct to a second direction.