Monolithic Gas Sensor With Segmented Capacitive Transducers

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Solution Overview

Problem

Existing chemical sensor arrangements, particularly capacitive sensors, face limitations in achieving accurate and fast measurements across a broad range of gas parameters due to the inherent compromises in sensitivity and response time associated with single-transducer designs.

Innovation Solution

A monolithic gas sensor arrangement featuring multiple transducers with different sensitive layers, each with unique properties such as materials and thicknesses, coupled with a readout circuit that generates measurement signals and combines them using weighted arithmetic means and frequency-dependent filter functions to enhance measurement accuracy and speed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single-transducer design is used, then the device complexity is reduced, but the measurement precision and response time cannot be optimized simultaneously across a broad range of gas parameters

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidsensor structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The sensor arrangement is divided into multiple independent transducers (first transducer with first sensitive layer, second transducer with second sensitive layer), each optimized for specific measurement conditions. This segmentation allows each transducer to specialize in detecting particular gas parameters or ranges, achieving high measurement precision without requiring a single complex transducer design

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The sensor arrangement integrates multiple transducers with different sensitive layer properties (materials, thicknesses) to create a multi-functional system. Each transducer can be optimized for specific gas types or concentration ranges, enabling the overall system to accurately measure a broad spectrum of gas parameters while maintaining relatively simple individual transducer structures

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If the sensitive layer is made thicker to improve accuracy, then the measurement precision increases, but the response time deteriorates

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidresponse time
Core Design Contradiction:
Measurement precisionVSSpeed

Solution Approach 1:

Different transducers are assigned different sensitive layer thicknesses based on their specific measurement functions. Some transducers use thicker sensitive layers optimized for high accuracy in stable conditions, while others use thinner layers optimized for fast response times. This local optimization of thickness quality allows the system to achieve both accuracy and speed without compromise

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The system varies the thickness parameter of sensitive layers across different transducers to optimize performance. By changing this physical parameter, each transducer can be tuned for specific applications - thicker layers for accuracy-critical measurements, thinner layers for speed-critical measurements - and the system can select or combine results based on current measurement needs

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If multiple transducers with different sensitive layer properties are used, then the measurement precision and range are improved, but the device complexity increases

Engineering Contradiction:
Improvemeasurement rangeVSAvoidsensor structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The sensor system is segmented into multiple specialized transducers, each with sensitive layers having different properties (materials, thicknesses) optimized for specific gas parameters or ranges. This segmentation enables the system to cover a broad measurement range with relatively simple, specialized components rather than one complex universal transducer

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system uses different material compositions for sensitive layers in different transducers, creating a composite sensor system. Each material is selected for its specific affinity to certain gas molecules or its electrical properties, allowing the overall system to detect a wide variety of gas parameters while each individual transducer remains structurally simple

Inventive Principle:
Principle #40Composite materials

4Speed

If a faster response time is achieved with a thinner sensitive layer, then the speed increases, but the measurement precision deteriorates

Engineering Contradiction:
Improveresponse timeVSAvoidmeasurement accuracy
Core Design Contradiction:
SpeedVSMeasurement precision

Solution Approach 1:

Transducers requiring fast response times are equipped with thinner sensitive layers optimized for speed, while transducers where accuracy is paramount use thicker layers. This local optimization of layer quality allows each transducer to excel at its specific function without compromising the overall system performance

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The system can use feedback from multiple transducers to compensate for the limitations of individual fast-response transducers. By comparing measurements from transducers with different response characteristics, the system can validate and refine results, achieving both speed and accuracy through coordinated operation

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables simultaneous fast and accurate measurements of gas parameters, improving measurement quality and range compared to single-transducer sensors by leveraging the strengths of each transducer, such as selective accuracy and response times, while minimizing inaccuracies from surface contaminations and drift.

Implementation Method 1

the sensitive layer is configured to absorb gas molecules

Methodology Applied
Scientific EffectAbsorption: Absorption (physical)

Implementation Method 2

generates a first measurement signal depending on the capacitance of the first transducer and a second measurement signal depending on the capacitance of the second transducer

Methodology Applied
Scientific EffectCapacitance: Capacitance

Data Source

PatentEP3540422B1Monolithic gas sensor arrangement, manufacturing method and measurement method
Publication Date: 2024.01.03 SCIOSENSE BV
  • EP3540422B1 patent drawingFigure 1A~1C
  • EP3540422B1 patent drawingFigure 2A~2E
  • EP3540422B1 patent drawingFigure 3A~3C

AI summary

A monolithic gas sensor arrangement has a first capacitive transducer (11) comprising a first sensitive layer (17) and a second capacitive transducer (12) comprising a second sensitive layer (18), wherein the first and the second sensitive layer (17, 18) differ from each other in at least one property. The arrangement further comprises a readout circuit (30) that comprises a capacitance-to-digital converter (31), is electrically coupled to the first and the second transducer (11, 12) and is configured to generate a first measurement signal based on the first transducer (11) and a second measurement signal based on the second transducer (12).