Monolithic IC Array Interconnects for Flexible Sensor Manufacturing

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Solution Overview

Problem

The manufacturing of flexible and stretchable integrated circuit arrays for applications like ultrasound imaging systems is complicated due to the complexity of connecting electrical interconnects in a post-processing step, increasing technical effort.

Innovation Solution

The integration of electrical interconnects as metal lines within the integrated circuit elements during the IC process, forming a monolithic structure, allows for a flexible and stretchable connection layer to be coupled with the circuit elements, reducing the need for post-processing electrical connections and simplifying the manufacturing process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If electrical interconnects are connected in a post-processing step, then flexible and stretchable sensor arrays can be manufactured, but the technical effort for manufacturing is increased

Engineering Contradiction:
Improveflexibility and stretchability of sensor arraysVSAvoidtechnical effort for manufacturing
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The electrical interconnects are formed as metal lines during the integrated circuit fabrication process itself, before the sensor array is assembled. This preliminary integration eliminates the need for separate post-processing connection steps, reducing manufacturing complexity while maintaining flexibility and stretchability through the monolithic structure design

Inventive Principle:
Principle #10Preliminary action

2Adaptability or versatility

If individual transducer elements are fabricated on silicon wafer and attached to flexible layer, then stretchable CMUT array can be manufactured, but the manufacturing process becomes complex with multiple separate steps

Engineering Contradiction:
Improvestretchability of CMUT arrayVSAvoidmanufacturing process complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges the fabrication of electrical interconnects with the integrated circuit elements into a single monolithic structure formed during the IC process. This combining of previously separate steps (interconnect fabrication and circuit element fabrication) into one integrated process reduces manufacturing complexity while maintaining the stretchable array configuration

Inventive Principle:
Principle #5Merging (Combining)

3Ease of manufacture

If electrical interconnects are formed as metal lines forming monolithic structure with integrated interconnects, then manufacturing effort is reduced, but the interconnects must be separated from the connection layer

Engineering Contradiction:
Improvemanufacturing effortVSAvoidstructural complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent segments the electrical interconnects from the flexible connection layer, allowing the metal line interconnects to be formed as a monolithic structure with the integrated circuits during fabrication, while the connection layer serves as a separate flexible substrate. This segmentation enables simplified manufacturing through integrated processing while managing structural complexity through functional separation

Inventive Principle:
Principle #1Segmentation

Data Source

PatentEP3069382B1Integrated circuit array and method for manufacturing an array of integrated circuits
Publication Date: 2021.09.29 KONINKLIJKE PHILIPS NV
  • EP3069382B1 patent drawingFigure 1
  • EP3069382B1 patent drawingFigure 2
  • EP3069382B1 patent drawingFigure 3a~3c

AI summary

An integrated circuit array, in particular for two dimensional sensor arrays such as ultrasound imaging systems is disclosed. The integrated circuit array (10) comprises a plurality of integrated circuit elements (12) each formed in a substrate (14), wherein the substrates are separated from each other. The array comprises a flexible and / or stretchable connection layer (22) connected to the integrated circuit elements for flexibly connecting the integrated circuit elements to each other. The array further comprises a plurality of electrical interconnects (18) for electrically connecting the integrated circuit elements to each other, wherein the electrical interconnects are formed as metal lines in one piece with integrated interconnects of the integrated circuit elements.