Monolithic IGBT Diode Integration for Quasi-Resonant Converters
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Solution Overview
Problem
Conventional quasi-resonant converters require co-packaging of separate IGBT and diode dies, increasing manufacturing costs and resistance, and often necessitate complex backside processing, which can lead to snapback issues and wafer damage.
Innovation Solution
A monolithic IGBT structure integrated with a lateral diode, formed using the channel stop region, eliminating the need for co-packaging and backside processing, allowing for a larger IGBT die and smaller package size without snapback problems, and enabling separate control of injection efficiency without conventional lifetime control processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate IGBT and diode dies are co-packaged, then the device can achieve required functionality, but manufacturing cost increases and resistance increases
Solution Approach 1:
The patent merges the IGBT and diode functions into a single monolithic semiconductor structure. The IGBT device includes an integrated body diode formed within the same semiconductor substrate, eliminating the need for separate diode die and co-packaging operations. This integration reduces manufacturing complexity and cost while maintaining the required reverse conduction functionality.
2Reliability
If separate IGBT and diode dies are co-packaged, then the device can achieve required functionality, but the IGBT must be made smaller which increases resistance and reduces current handling capability
Solution Approach 1:
The patent combines both the IGBT and diode functions within a single semiconductor die, eliminating the need for separate diode die and reducing the overall package footprint. This integration allows the IGBT to be optimized for current handling capability without being constrained by the need to accommodate separate components.
3Reliability
If backside processing is used to form reverse conducting diode, then the diode can be integrated, but production cost increases and wafer damage risk increases
Solution Approach 1:
Instead of forming the diode through backside processing as in conventional approaches, the patent forms the body diode through frontside processing during the standard IGBT fabrication sequence. The diode is created using the channel stop region and existing doped layers, eliminating the need for additional backside implantation steps and associated costs.
4Reliability
If backside processing is used to form reverse conducting diode, then the diode can be integrated, but snapback issues occur during device turn-on
Solution Approach 1:
The patent inverts the conventional approach by forming the diode through frontside processing rather than backside processing. This alternative formation method using the channel stop region and existing doped layers eliminates the snapback phenomenon that occurs during device turn-on in conventionally processed devices.
Data Source
AI summary
This invention discloses a semiconductor power device formed in a semiconductor substrate. The semiconductor power device further includes a channel stop region near a peripheral of the semiconductor substrate wherein the channel stop region further includes a peripheral terminal of a diode corresponding with another terminal of the diode laterally opposite from the peripheral terminal disposed on an active area of the semiconductor power device. In an embodiment of this invention, the semiconductor power device is an insulated gate bipolar transistor (IGBT).


