Monolithic Interdigitated Electrodes for Ion Filter Substrate Elimination
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Solution Overview
Problem
Existing ion filter manufacturing methods require an insulative substrate, which complicates the process and is not suitable for microchip implementations due to issues like molecular diffusion and high voltages, especially in field asymmetric ion mobility spectrometry.
Innovation Solution
A monolithic structure is used to form ion filters with electrodes connected through a portion of the same material, providing electrical separation without a substrate, achieved by selective etching and impedance alteration through doping or physical modifications.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an insulative substrate is used to separate electrodes, then electrical separation is achieved, but device complexity and manufacturing complexity increase
Solution Approach 1:
The patent extracts and removes the insulative substrate from the electrode structure, leaving only the essential conductive elements. The electrodes are formed directly on the drift tube surface without requiring a separate insulating substrate, thereby simplifying the device while maintaining electrical separation through the conductive pattern design itself.
Solution Approach 2:
The patent merges the electrode structure with the drift tube surface, eliminating the need for a separate insulative substrate. The conductive electrodes are formed directly on the drift tube, combining what were previously separate components (substrate + electrodes) into a single integrated structure.
2Manufacturing precision
If conventional microfabrication techniques with multiple etching steps are used, then electrodes and channels are formed, but manufacturing complexity increases
Solution Approach 1:
The patent segments the manufacturing process into distinct functional regions (electrode areas and channel areas) that can be formed in sequence. By creating electrodes first and then forming channels between them, the process breaks down complex fabrication into manageable steps that reduce overall manufacturing complexity while maintaining precision.
Solution Approach 2:
The patent performs preliminary formation of electrodes before creating the channels between them. This sequence allows the electrode positions to be established first, which then guides subsequent channel formation, simplifying the overall manufacturing process compared to forming all structures simultaneously or in reverse sequence.
3Reliability
If paired interdigitated electrode structures are used for ion filtering, then ion selectivity is improved, but device size increases
Solution Approach 1:
The patent transitions from three-dimensional stacked electrode configurations to two-dimensional interdigitated electrodes formed on a flat drift tube surface. This dimensional change maintains the ion filtering functionality while dramatically reducing the device volume, allowing complex electrode patterns to be realized in a planar geometry that minimizes space requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method simplifies the manufacturing process, reduces the need for substrates, and allows for efficient electrical separation of electrodes, enabling smaller form factor ion mobility spectrometers and ion pumps with improved performance.
Implementation Method 1
the connecting portion of the structure provides a higher electrical impedance than the filter would provide without such a mechanical connection, to thereby electrically separate the electrodes
Implementation Method 2
selectively removing regions of the structure, to form a pair of electrodes defining at least one ion channel therebetween
Implementation Method 3
impedance alteration through doping or physical modifications
Data Source
AI summary
An ion filter and a method of manufacturing an ion filter. The method including providing a monolithic structure; selectively removing regions of the structure, to form a pair of electrodes defining at least one ion channel therebetween. The electrodes are preferably mechanically connected at one or more locations by a portion of the structure; wherein the connecting portion of the structure provides a higher electrical impedance than the filter would provide without such a mechanical connection, to thereby electrically separate the electrodes.