Monolithic Connection Assembly for High-Pressure Liquid Metal

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Solution Overview

Problem

Existing liquid metal supply systems for EUV lithography face issues with leakage due to cracked connections, material embrittlement, and difficulty in handling and manufacturing thin transfer pipes, which are prone to damage and rupture under high pressure.

Innovation Solution

A monolithic connection assembly with integrated freeze valves and passages formed from a single block, using materials like molybdenum or tantalum alloys, which are resistant to liquid tin and reduce the risk of leakage by eliminating separate connections and joints, and incorporating thermal conditioning elements for controlled metal flow.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If separate pipes and freeze valves are used to transfer liquid metal, then the system is easier to manufacture individually, but the connections between components become cracked and leak after repeated use

Engineering Contradiction:

Improveease of manufacture of individual componentsVSAvoidleakage resistance of connections

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The patent merges the freeze valves and transfer pipes into a single monolithic block, eliminating separate connections between components. This integration ensures that the freeze valves and passages are formed as one piece, removing the joints that were prone to cracking and leakage in previous designs with separate components.

Inventive Principle:

Principle #5Merging (Combining)

2Quantity of substance

If thin transfer pipes are used to transfer liquid metal, then the system uses less material, but the pipes become difficult to handle and manufacture, and are prone to rupture under high pressure

Engineering Contradiction:

Improveamount of material usedVSAvoidease of handling and manufacturing

Core Design Contradiction:

Quantity of substanceVSEase of manufacture

Solution Approach 1:

By combining the transfer pipes and freeze valves into a monolithic block, the patent eliminates the need for separate thin-walled pipes that are difficult to handle. The integrated structure provides inherent structural support, making the system easier to manufacture and handle while maintaining material efficiency.

Inventive Principle:

Principle #5Merging (Combining)

3Reliability

If tantalum alloy pipes are used to resist liquid metal exposure, then the material is stable to liquid tin, but the alloy becomes brittle due to oxygen embrittlement at high temperatures

Engineering Contradiction:

Improvechemical stability with liquid metalVSAvoidmechanical strength at high temperature

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

The patent employs a monolithic block construction that can be made from materials resistant to oxygen embrittlement, such as certain ceramics or specially treated alloys. This composite approach maintains chemical stability with liquid metal while avoiding the high-temperature embrittlement issues that affect tantalum alloy pipes.

Inventive Principle:

Principle #40Composite materials

4Adaptability or versatility

If multiple connections and joints are used in the liquid metal supply system, then the system is more flexible in assembly, but the risk of leakage increases at each connection point

Engineering Contradiction:

Improveassembly flexibilityVSAvoidleakage risk at connections

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The patent merges multiple components into a single monolithic block, eliminating the connections and joints that create leakage risks. This integration maintains assembly flexibility through the design of the monolithic structure itself, while removing the weak points where leaks would occur at connection interfaces.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The monolithic design enhances leak-proof performance, simplifies manufacturing, and withstands higher pressures, reducing the risk of damage and leakage, while allowing precise control over liquid metal transfer.

Implementation Method 1

at least two freeze valves configured to block a passage by solidifying liquid metal therein

Methodology Applied

Scientific EffectFreezing: Freezing

Implementation Method 2

interior passages configured to fluidly connect the at least one connection with at least two liquid metal outlets/inlets

Methodology Applied

Scientific EffectPressure-driven flow: Pressure Gradient

Data Source

PatentUS12426145B2Connection assembly

Publication Date: 2025.09.23 ASML NETHERLANDS BV

AI summary

There is described a connection assembly (24) for a high-pressure liquid metal supply system used in an EUV light source comprising a monolithic block, wherein the monolithic block includes: at least one connection (21) for connecting to a reservoir (18,19) configured to hold liquid metal; interior passages (25) configured to fluidly connect the at least one connection with at least two liquid metal outlets/inlets (22, 23); at least two freeze valves (15,16,17) configured to block a passage by solidifying liquid metal therein. Also described is a liquid metal storage assembly including such a connection assembly, a lithography apparatus including such a liquid metal storage assembly or such a connection assembly, as well as the use of such assemblies or apparatus in a lithographic apparatus or method.